11/23/2011	8:42:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2011	8:42:45 AM	Recipe started at 8:42 AM
11/23/2011	8:42:45 AM	Helium valve closed
11/23/2011	8:42:45 AM	H2 valve closed
11/23/2011	8:42:45 AM	BCl3 valve closed
11/23/2011	8:42:45 AM	PH3 valve closed
11/23/2011	8:42:45 AM	SiCl4 pre valve closed
11/23/2011	8:42:45 AM	SiCl4 post valve closed
11/23/2011	8:42:45 AM	Main Vac valve closed
11/23/2011	8:42:45 AM	Bypass valve closed
11/23/2011	8:42:45 AM	Bubbler valve closed
11/23/2011	8:42:45 AM	Helium MFC set to  0.000000
11/23/2011	8:42:45 AM	H2 MFC set to  0.000000
11/23/2011	8:42:45 AM	BCl3 MFC set to  0.000000
11/23/2011	8:42:45 AM	PHl3 MFC set to  0.000000
11/23/2011	8:42:45 AM	SiCl4 MFC set to  0.000000
11/23/2011	8:42:45 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	8:42:45 AM	Tube furnace set to 0
11/23/2011	8:42:48 AM	H2 valve closed
11/23/2011	8:42:48 AM	BCl3 valve closed
11/23/2011	8:42:48 AM	PH3 valve closed
11/23/2011	8:42:48 AM	SiCl4 pre valve closed
11/23/2011	8:42:48 AM	SiCl4 post valve closed
11/23/2011	8:42:48 AM	Main Vac valve closed
11/23/2011	8:42:48 AM	Bypass valve closed
11/23/2011	8:42:48 AM	Bubbler valve closed
11/23/2011	8:42:48 AM	Helium valve opened
11/23/2011	8:42:48 AM	Helium MFC set to  500.000000
11/23/2011	8:42:48 AM	H2 MFC set to  0.000000
11/23/2011	8:42:48 AM	BCl3 MFC set to  0.000000
11/23/2011	8:42:48 AM	PHl3 MFC set to  0.000000
11/23/2011	8:42:48 AM	SiCl4 MFC set to  0.000000
11/23/2011	8:42:48 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	8:42:48 AM	Tube furnace set to 0
11/23/2011	8:43:54 AM	Helium valve closed
11/23/2011	8:43:54 AM	H2 valve closed
11/23/2011	8:43:54 AM	BCl3 valve closed
11/23/2011	8:43:54 AM	PH3 valve closed
11/23/2011	8:43:54 AM	SiCl4 pre valve closed
11/23/2011	8:43:54 AM	SiCl4 post valve closed
11/23/2011	8:43:54 AM	Main Vac valve closed
11/23/2011	8:43:54 AM	Bypass valve closed
11/23/2011	8:43:54 AM	Bubbler valve closed
11/23/2011	8:43:54 AM	Helium MFC set to  0.000000
11/23/2011	8:43:54 AM	H2 MFC set to  0.000000
11/23/2011	8:43:54 AM	BCl3 MFC set to  0.000000
11/23/2011	8:43:54 AM	PHl3 MFC set to  0.000000
11/23/2011	8:43:54 AM	SiCl4 MFC set to  0.000000
11/23/2011	8:43:54 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	8:43:54 AM	Tube furnace set to 0
11/23/2011	8:43:55 AM	Run finished at 8:43 AM
11/23/2011	8:43:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2011	8:47:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	8:47:16 AM	Recipe started at 8:47 AM
11/23/2011	8:47:16 AM	Helium valve closed
11/23/2011	8:47:16 AM	H2 valve closed
11/23/2011	8:47:16 AM	BCl3 valve closed
11/23/2011	8:47:16 AM	PH3 valve closed
11/23/2011	8:47:16 AM	SiCl4 pre valve closed
11/23/2011	8:47:16 AM	SiCl4 post valve closed
11/23/2011	8:47:16 AM	Main Vac valve closed
11/23/2011	8:47:16 AM	Bubbler valve closed
11/23/2011	8:47:16 AM	Bypass valve opened
11/23/2011	8:47:16 AM	Helium MFC set to  0.000000
11/23/2011	8:47:16 AM	H2 MFC set to  0.000000
11/23/2011	8:47:16 AM	BCl3 MFC set to  0.000000
11/23/2011	8:47:16 AM	PHl3 MFC set to  0.000000
11/23/2011	8:47:16 AM	SiCl4 MFC set to  0.000000
11/23/2011	8:47:16 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	8:47:16 AM	Tube furnace set to 0
11/23/2011	8:48:17 AM	Helium valve closed
11/23/2011	8:48:17 AM	H2 valve closed
11/23/2011	8:48:17 AM	BCl3 valve closed
11/23/2011	8:48:17 AM	PH3 valve closed
11/23/2011	8:48:17 AM	SiCl4 pre valve closed
11/23/2011	8:48:17 AM	SiCl4 post valve closed
11/23/2011	8:48:17 AM	Main Vac valve closed
11/23/2011	8:48:17 AM	Bubbler valve closed
11/23/2011	8:48:17 AM	Bypass valve opened
11/23/2011	8:48:17 AM	Helium MFC set to  0.000000
11/23/2011	8:48:17 AM	H2 MFC set to  0.000000
11/23/2011	8:48:17 AM	BCl3 MFC set to  0.000000
11/23/2011	8:48:17 AM	PHl3 MFC set to  0.000000
11/23/2011	8:48:17 AM	SiCl4 MFC set to  0.000000
11/23/2011	8:48:17 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	8:48:17 AM	Tube furnace set to 0
11/23/2011	8:48:41 AM	Helium valve closed
11/23/2011	8:48:41 AM	H2 valve closed
11/23/2011	8:48:41 AM	BCl3 valve closed
11/23/2011	8:48:41 AM	PH3 valve closed
11/23/2011	8:48:41 AM	SiCl4 pre valve closed
11/23/2011	8:48:41 AM	SiCl4 post valve closed
11/23/2011	8:48:41 AM	Bypass valve closed
11/23/2011	8:48:41 AM	Bubbler valve closed
11/23/2011	8:48:41 AM	Main Vac valve opened
11/23/2011	8:48:41 AM	Helium MFC set to  0.000000
11/23/2011	8:48:41 AM	H2 MFC set to  0.000000
11/23/2011	8:48:41 AM	BCl3 MFC set to  0.000000
11/23/2011	8:48:41 AM	PHl3 MFC set to  0.000000
11/23/2011	8:48:41 AM	SiCl4 MFC set to  0.000000
11/23/2011	8:48:41 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	8:48:41 AM	Tube furnace set to 0
11/23/2011	8:48:42 AM	Run finished at 8:48 AM
11/23/2011	8:48:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	11:42:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2011	11:42:57 AM	Recipe started at 11:42 AM
11/23/2011	11:42:57 AM	Helium valve closed
11/23/2011	11:42:57 AM	H2 valve closed
11/23/2011	11:42:57 AM	BCl3 valve closed
11/23/2011	11:42:57 AM	PH3 valve closed
11/23/2011	11:42:57 AM	SiCl4 pre valve closed
11/23/2011	11:42:57 AM	SiCl4 post valve closed
11/23/2011	11:42:57 AM	Main Vac valve closed
11/23/2011	11:42:57 AM	Bypass valve closed
11/23/2011	11:42:57 AM	Bubbler valve closed
11/23/2011	11:42:57 AM	Helium MFC set to  0.000000
11/23/2011	11:42:57 AM	H2 MFC set to  0.000000
11/23/2011	11:42:57 AM	BCl3 MFC set to  0.000000
11/23/2011	11:42:57 AM	PHl3 MFC set to  0.000000
11/23/2011	11:42:57 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:42:57 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:42:57 AM	Tube furnace set to 0
11/23/2011	11:43:00 AM	H2 valve closed
11/23/2011	11:43:00 AM	BCl3 valve closed
11/23/2011	11:43:00 AM	PH3 valve closed
11/23/2011	11:43:00 AM	SiCl4 pre valve closed
11/23/2011	11:43:00 AM	SiCl4 post valve closed
11/23/2011	11:43:00 AM	Main Vac valve closed
11/23/2011	11:43:00 AM	Bypass valve closed
11/23/2011	11:43:00 AM	Bubbler valve closed
11/23/2011	11:43:00 AM	Helium valve opened
11/23/2011	11:43:00 AM	Helium MFC set to  500.000000
11/23/2011	11:43:00 AM	H2 MFC set to  0.000000
11/23/2011	11:43:00 AM	BCl3 MFC set to  0.000000
11/23/2011	11:43:00 AM	PHl3 MFC set to  0.000000
11/23/2011	11:43:00 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:43:00 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:43:00 AM	Tube furnace set to 0
11/23/2011	11:44:05 AM	Helium valve closed
11/23/2011	11:44:05 AM	H2 valve closed
11/23/2011	11:44:05 AM	BCl3 valve closed
11/23/2011	11:44:05 AM	PH3 valve closed
11/23/2011	11:44:05 AM	SiCl4 pre valve closed
11/23/2011	11:44:05 AM	SiCl4 post valve closed
11/23/2011	11:44:05 AM	Main Vac valve closed
11/23/2011	11:44:05 AM	Bypass valve closed
11/23/2011	11:44:05 AM	Bubbler valve closed
11/23/2011	11:44:05 AM	Helium MFC set to  0.000000
11/23/2011	11:44:05 AM	H2 MFC set to  0.000000
11/23/2011	11:44:05 AM	BCl3 MFC set to  0.000000
11/23/2011	11:44:05 AM	PHl3 MFC set to  0.000000
11/23/2011	11:44:05 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:44:05 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:44:06 AM	Tube furnace set to 0
11/23/2011	11:44:07 AM	Run finished at 11:44 AM
11/23/2011	11:44:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2011	11:47:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	11:47:30 AM	Recipe started at 11:47 AM
11/23/2011	11:47:30 AM	Helium valve closed
11/23/2011	11:47:30 AM	H2 valve closed
11/23/2011	11:47:30 AM	BCl3 valve closed
11/23/2011	11:47:30 AM	PH3 valve closed
11/23/2011	11:47:30 AM	SiCl4 pre valve closed
11/23/2011	11:47:30 AM	SiCl4 post valve closed
11/23/2011	11:47:30 AM	Main Vac valve closed
11/23/2011	11:47:30 AM	Bubbler valve closed
11/23/2011	11:47:30 AM	Bypass valve opened
11/23/2011	11:47:30 AM	Helium MFC set to  0.000000
11/23/2011	11:47:30 AM	H2 MFC set to  0.000000
11/23/2011	11:47:30 AM	BCl3 MFC set to  0.000000
11/23/2011	11:47:30 AM	PHl3 MFC set to  0.000000
11/23/2011	11:47:30 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:47:30 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:47:30 AM	Tube furnace set to 0
11/23/2011	11:48:31 AM	Helium valve closed
11/23/2011	11:48:31 AM	H2 valve closed
11/23/2011	11:48:31 AM	BCl3 valve closed
11/23/2011	11:48:31 AM	PH3 valve closed
11/23/2011	11:48:31 AM	SiCl4 pre valve closed
11/23/2011	11:48:31 AM	SiCl4 post valve closed
11/23/2011	11:48:31 AM	Main Vac valve closed
11/23/2011	11:48:31 AM	Bubbler valve closed
11/23/2011	11:48:31 AM	Bypass valve opened
11/23/2011	11:48:31 AM	Helium MFC set to  0.000000
11/23/2011	11:48:31 AM	H2 MFC set to  0.000000
11/23/2011	11:48:31 AM	BCl3 MFC set to  0.000000
11/23/2011	11:48:31 AM	PHl3 MFC set to  0.000000
11/23/2011	11:48:31 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:48:31 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:48:31 AM	Tube furnace set to 0
11/23/2011	11:49:31 AM	Helium valve closed
11/23/2011	11:49:31 AM	H2 valve closed
11/23/2011	11:49:31 AM	BCl3 valve closed
11/23/2011	11:49:31 AM	PH3 valve closed
11/23/2011	11:49:31 AM	SiCl4 pre valve closed
11/23/2011	11:49:31 AM	SiCl4 post valve closed
11/23/2011	11:49:31 AM	Bypass valve closed
11/23/2011	11:49:31 AM	Bubbler valve closed
11/23/2011	11:49:31 AM	Main Vac valve opened
11/23/2011	11:49:31 AM	Helium MFC set to  0.000000
11/23/2011	11:49:31 AM	H2 MFC set to  0.000000
11/23/2011	11:49:31 AM	BCl3 MFC set to  0.000000
11/23/2011	11:49:31 AM	PHl3 MFC set to  0.000000
11/23/2011	11:49:31 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:49:31 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:49:32 AM	Tube furnace set to 0
11/23/2011	11:49:33 AM	Run finished at 11:49 AM
11/23/2011	11:49:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	11:51:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2011	11:51:03 AM	Recipe started at 11:51 AM
11/23/2011	11:51:03 AM	Helium valve closed
11/23/2011	11:51:03 AM	H2 valve closed
11/23/2011	11:51:03 AM	BCl3 valve closed
11/23/2011	11:51:03 AM	PH3 valve closed
11/23/2011	11:51:03 AM	SiCl4 pre valve closed
11/23/2011	11:51:03 AM	SiCl4 post valve closed
11/23/2011	11:51:03 AM	Main Vac valve closed
11/23/2011	11:51:03 AM	Bypass valve closed
11/23/2011	11:51:03 AM	Bubbler valve closed
11/23/2011	11:51:03 AM	Helium MFC set to  0.000000
11/23/2011	11:51:03 AM	H2 MFC set to  0.000000
11/23/2011	11:51:03 AM	BCl3 MFC set to  0.000000
11/23/2011	11:51:03 AM	PHl3 MFC set to  0.000000
11/23/2011	11:51:03 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:51:03 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:51:03 AM	Tube furnace set to 0
11/23/2011	11:51:06 AM	H2 valve closed
11/23/2011	11:51:06 AM	BCl3 valve closed
11/23/2011	11:51:06 AM	PH3 valve closed
11/23/2011	11:51:06 AM	SiCl4 pre valve closed
11/23/2011	11:51:06 AM	SiCl4 post valve closed
11/23/2011	11:51:06 AM	Main Vac valve closed
11/23/2011	11:51:06 AM	Bypass valve closed
11/23/2011	11:51:06 AM	Bubbler valve closed
11/23/2011	11:51:06 AM	Helium valve opened
11/23/2011	11:51:06 AM	Helium MFC set to  500.000000
11/23/2011	11:51:06 AM	H2 MFC set to  0.000000
11/23/2011	11:51:06 AM	BCl3 MFC set to  0.000000
11/23/2011	11:51:06 AM	PHl3 MFC set to  0.000000
11/23/2011	11:51:06 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:51:06 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:51:06 AM	Tube furnace set to 0
11/23/2011	11:52:12 AM	Helium valve closed
11/23/2011	11:52:12 AM	H2 valve closed
11/23/2011	11:52:12 AM	BCl3 valve closed
11/23/2011	11:52:12 AM	PH3 valve closed
11/23/2011	11:52:12 AM	SiCl4 pre valve closed
11/23/2011	11:52:12 AM	SiCl4 post valve closed
11/23/2011	11:52:12 AM	Main Vac valve closed
11/23/2011	11:52:12 AM	Bypass valve closed
11/23/2011	11:52:12 AM	Bubbler valve closed
11/23/2011	11:52:12 AM	Helium MFC set to  0.000000
11/23/2011	11:52:12 AM	H2 MFC set to  0.000000
11/23/2011	11:52:12 AM	BCl3 MFC set to  0.000000
11/23/2011	11:52:12 AM	PHl3 MFC set to  0.000000
11/23/2011	11:52:12 AM	SiCl4 MFC set to  0.000000
11/23/2011	11:52:12 AM	Bypass solenoid MFC set to  0.000000
11/23/2011	11:52:12 AM	Tube furnace set to 0
11/23/2011	11:52:13 AM	Run finished at 11:52 AM
11/23/2011	11:52:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2011	12:07:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	12:07:34 PM	Recipe started at 12:07 PM
11/23/2011	12:07:34 PM	Helium valve closed
11/23/2011	12:07:34 PM	H2 valve closed
11/23/2011	12:07:34 PM	BCl3 valve closed
11/23/2011	12:07:34 PM	PH3 valve closed
11/23/2011	12:07:34 PM	SiCl4 pre valve closed
11/23/2011	12:07:34 PM	SiCl4 post valve closed
11/23/2011	12:07:34 PM	Main Vac valve closed
11/23/2011	12:07:34 PM	Bubbler valve closed
11/23/2011	12:07:34 PM	Bypass valve opened
11/23/2011	12:07:34 PM	Helium MFC set to  0.000000
11/23/2011	12:07:34 PM	H2 MFC set to  0.000000
11/23/2011	12:07:34 PM	BCl3 MFC set to  0.000000
11/23/2011	12:07:34 PM	PHl3 MFC set to  0.000000
11/23/2011	12:07:34 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:07:34 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:07:34 PM	Tube furnace set to 0
11/23/2011	12:08:41 PM	Helium valve closed
11/23/2011	12:08:41 PM	H2 valve closed
11/23/2011	12:08:41 PM	BCl3 valve closed
11/23/2011	12:08:41 PM	PH3 valve closed
11/23/2011	12:08:41 PM	SiCl4 pre valve closed
11/23/2011	12:08:41 PM	SiCl4 post valve closed
11/23/2011	12:08:41 PM	Main Vac valve closed
11/23/2011	12:08:41 PM	Bubbler valve closed
11/23/2011	12:08:41 PM	Bypass valve opened
11/23/2011	12:08:41 PM	Helium MFC set to  0.000000
11/23/2011	12:08:41 PM	H2 MFC set to  0.000000
11/23/2011	12:08:41 PM	BCl3 MFC set to  0.000000
11/23/2011	12:08:41 PM	PHl3 MFC set to  0.000000
11/23/2011	12:08:41 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:08:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:08:42 PM	Tube furnace set to 0
11/23/2011	12:09:42 PM	Helium valve closed
11/23/2011	12:09:42 PM	H2 valve closed
11/23/2011	12:09:42 PM	BCl3 valve closed
11/23/2011	12:09:42 PM	PH3 valve closed
11/23/2011	12:09:42 PM	SiCl4 pre valve closed
11/23/2011	12:09:42 PM	SiCl4 post valve closed
11/23/2011	12:09:42 PM	Bypass valve closed
11/23/2011	12:09:42 PM	Bubbler valve closed
11/23/2011	12:09:42 PM	Main Vac valve opened
11/23/2011	12:09:42 PM	Helium MFC set to  0.000000
11/23/2011	12:09:42 PM	H2 MFC set to  0.000000
11/23/2011	12:09:42 PM	BCl3 MFC set to  0.000000
11/23/2011	12:09:42 PM	PHl3 MFC set to  0.000000
11/23/2011	12:09:42 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:09:42 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:09:42 PM	Tube furnace set to 0
11/23/2011	12:09:43 PM	Run finished at 12:09 PM
11/23/2011	12:09:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	12:43:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/23/2011	12:43:56 PM	Recipe started at 12:43 PM
11/23/2011	12:43:56 PM	Helium valve closed
11/23/2011	12:43:56 PM	H2 valve closed
11/23/2011	12:43:56 PM	BCl3 valve closed
11/23/2011	12:43:56 PM	PH3 valve closed
11/23/2011	12:43:56 PM	SiCl4 pre valve closed
11/23/2011	12:43:56 PM	SiCl4 post valve closed
11/23/2011	12:43:56 PM	Main Vac valve closed
11/23/2011	12:43:56 PM	Bubbler valve closed
11/23/2011	12:43:56 PM	Bypass valve opened
11/23/2011	12:43:56 PM	Helium MFC set to  0.000000
11/23/2011	12:43:56 PM	H2 MFC set to  0.000000
11/23/2011	12:43:56 PM	BCl3 MFC set to  0.000000
11/23/2011	12:43:56 PM	PHl3 MFC set to  0.000000
11/23/2011	12:43:56 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:43:56 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:43:57 PM	Tube furnace set to 0
11/23/2011	12:43:57 PM	Helium valve closed
11/23/2011	12:43:57 PM	H2 valve closed
11/23/2011	12:43:57 PM	BCl3 valve closed
11/23/2011	12:43:57 PM	PH3 valve closed
11/23/2011	12:43:57 PM	SiCl4 pre valve closed
11/23/2011	12:43:57 PM	SiCl4 post valve closed
11/23/2011	12:43:57 PM	Main Vac valve closed
11/23/2011	12:43:57 PM	Bubbler valve closed
11/23/2011	12:43:57 PM	Bypass valve opened
11/23/2011	12:43:57 PM	Helium MFC set to  0.000000
11/23/2011	12:43:57 PM	H2 MFC set to  0.000000
11/23/2011	12:43:57 PM	BCl3 MFC set to  0.000000
11/23/2011	12:43:57 PM	PHl3 MFC set to  0.000000
11/23/2011	12:43:57 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:43:57 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:43:57 PM	Tube furnace set to 0
11/23/2011	12:44:15 PM	Helium valve closed
11/23/2011	12:44:15 PM	H2 valve closed
11/23/2011	12:44:15 PM	BCl3 valve closed
11/23/2011	12:44:15 PM	PH3 valve closed
11/23/2011	12:44:15 PM	SiCl4 pre valve closed
11/23/2011	12:44:15 PM	SiCl4 post valve closed
11/23/2011	12:44:15 PM	Bypass valve closed
11/23/2011	12:44:15 PM	Bubbler valve closed
11/23/2011	12:44:15 PM	Main Vac valve opened
11/23/2011	12:44:15 PM	Helium MFC set to  0.000000
11/23/2011	12:44:15 PM	H2 MFC set to  0.000000
11/23/2011	12:44:15 PM	BCl3 MFC set to  0.000000
11/23/2011	12:44:15 PM	PHl3 MFC set to  0.000000
11/23/2011	12:44:15 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:44:15 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:44:15 PM	Tube furnace set to 0
11/23/2011	12:44:20 PM	H2 valve closed
11/23/2011	12:44:20 PM	BCl3 valve closed
11/23/2011	12:44:20 PM	PH3 valve closed
11/23/2011	12:44:20 PM	SiCl4 pre valve closed
11/23/2011	12:44:20 PM	SiCl4 post valve closed
11/23/2011	12:44:20 PM	Bypass valve closed
11/23/2011	12:44:20 PM	Bubbler valve closed
11/23/2011	12:44:20 PM	Helium valve opened
11/23/2011	12:44:20 PM	Main Vac valve opened
11/23/2011	12:44:20 PM	Helium MFC set to  20.000000
11/23/2011	12:44:20 PM	H2 MFC set to  0.000000
11/23/2011	12:44:20 PM	BCl3 MFC set to  0.000000
11/23/2011	12:44:20 PM	PHl3 MFC set to  0.000000
11/23/2011	12:44:20 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:44:20 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:44:20 PM	Tube furnace set to 0
11/23/2011	12:44:51 PM	Helium valve closed
11/23/2011	12:44:51 PM	H2 valve closed
11/23/2011	12:44:51 PM	BCl3 valve closed
11/23/2011	12:44:51 PM	PH3 valve closed
11/23/2011	12:44:51 PM	SiCl4 pre valve closed
11/23/2011	12:44:51 PM	SiCl4 post valve closed
11/23/2011	12:44:51 PM	Bypass valve closed
11/23/2011	12:44:51 PM	Bubbler valve closed
11/23/2011	12:44:51 PM	Main Vac valve opened
11/23/2011	12:44:51 PM	Helium MFC set to  0.000000
11/23/2011	12:44:51 PM	H2 MFC set to  0.000000
11/23/2011	12:44:51 PM	BCl3 MFC set to  0.000000
11/23/2011	12:44:51 PM	PHl3 MFC set to  0.000000
11/23/2011	12:44:51 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:44:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:44:51 PM	Tube furnace set to 0
11/23/2011	12:45:21 PM	H2 valve closed
11/23/2011	12:45:21 PM	BCl3 valve closed
11/23/2011	12:45:21 PM	PH3 valve closed
11/23/2011	12:45:21 PM	SiCl4 pre valve closed
11/23/2011	12:45:21 PM	SiCl4 post valve closed
11/23/2011	12:45:21 PM	Bypass valve closed
11/23/2011	12:45:21 PM	Bubbler valve closed
11/23/2011	12:45:21 PM	Helium valve opened
11/23/2011	12:45:21 PM	Main Vac valve opened
11/23/2011	12:45:21 PM	Helium MFC set to  20.000000
11/23/2011	12:45:21 PM	H2 MFC set to  0.000000
11/23/2011	12:45:21 PM	BCl3 MFC set to  0.000000
11/23/2011	12:45:21 PM	PHl3 MFC set to  0.000000
11/23/2011	12:45:21 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:45:21 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:45:21 PM	Tube furnace set to 0
11/23/2011	12:45:51 PM	Helium valve closed
11/23/2011	12:45:51 PM	H2 valve closed
11/23/2011	12:45:51 PM	BCl3 valve closed
11/23/2011	12:45:51 PM	PH3 valve closed
11/23/2011	12:45:51 PM	SiCl4 pre valve closed
11/23/2011	12:45:51 PM	SiCl4 post valve closed
11/23/2011	12:45:51 PM	Bypass valve closed
11/23/2011	12:45:51 PM	Bubbler valve closed
11/23/2011	12:45:51 PM	Main Vac valve opened
11/23/2011	12:45:51 PM	Helium MFC set to  0.000000
11/23/2011	12:45:51 PM	H2 MFC set to  0.000000
11/23/2011	12:45:51 PM	BCl3 MFC set to  0.000000
11/23/2011	12:45:51 PM	PHl3 MFC set to  0.000000
11/23/2011	12:45:51 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:45:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:45:51 PM	Tube furnace set to 0
11/23/2011	12:46:21 PM	H2 valve closed
11/23/2011	12:46:21 PM	BCl3 valve closed
11/23/2011	12:46:21 PM	PH3 valve closed
11/23/2011	12:46:21 PM	SiCl4 pre valve closed
11/23/2011	12:46:21 PM	SiCl4 post valve closed
11/23/2011	12:46:21 PM	Bypass valve closed
11/23/2011	12:46:21 PM	Bubbler valve closed
11/23/2011	12:46:21 PM	Helium valve opened
11/23/2011	12:46:21 PM	Main Vac valve opened
11/23/2011	12:46:21 PM	Helium MFC set to  20.000000
11/23/2011	12:46:21 PM	H2 MFC set to  0.000000
11/23/2011	12:46:21 PM	BCl3 MFC set to  0.000000
11/23/2011	12:46:21 PM	PHl3 MFC set to  0.000000
11/23/2011	12:46:21 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:46:21 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:46:21 PM	Tube furnace set to 0
11/23/2011	12:46:51 PM	Helium valve closed
11/23/2011	12:46:51 PM	H2 valve closed
11/23/2011	12:46:51 PM	BCl3 valve closed
11/23/2011	12:46:51 PM	PH3 valve closed
11/23/2011	12:46:51 PM	SiCl4 pre valve closed
11/23/2011	12:46:51 PM	SiCl4 post valve closed
11/23/2011	12:46:51 PM	Bypass valve closed
11/23/2011	12:46:51 PM	Bubbler valve closed
11/23/2011	12:46:51 PM	Main Vac valve opened
11/23/2011	12:46:51 PM	Helium MFC set to  0.000000
11/23/2011	12:46:51 PM	H2 MFC set to  0.000000
11/23/2011	12:46:51 PM	BCl3 MFC set to  0.000000
11/23/2011	12:46:51 PM	PHl3 MFC set to  0.000000
11/23/2011	12:46:51 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:46:51 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:46:52 PM	Tube furnace set to 0
11/23/2011	12:47:22 PM	H2 valve closed
11/23/2011	12:47:22 PM	BCl3 valve closed
11/23/2011	12:47:22 PM	PH3 valve closed
11/23/2011	12:47:22 PM	SiCl4 pre valve closed
11/23/2011	12:47:22 PM	SiCl4 post valve closed
11/23/2011	12:47:22 PM	Bypass valve closed
11/23/2011	12:47:22 PM	Bubbler valve closed
11/23/2011	12:47:22 PM	Helium valve opened
11/23/2011	12:47:22 PM	Main Vac valve opened
11/23/2011	12:47:22 PM	Helium MFC set to  20.000000
11/23/2011	12:47:22 PM	H2 MFC set to  0.000000
11/23/2011	12:47:22 PM	BCl3 MFC set to  0.000000
11/23/2011	12:47:22 PM	PHl3 MFC set to  0.000000
11/23/2011	12:47:22 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:47:22 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:47:22 PM	Tube furnace set to 0
11/23/2011	12:47:52 PM	Helium valve closed
11/23/2011	12:47:52 PM	H2 valve closed
11/23/2011	12:47:52 PM	BCl3 valve closed
11/23/2011	12:47:52 PM	PH3 valve closed
11/23/2011	12:47:52 PM	SiCl4 pre valve closed
11/23/2011	12:47:52 PM	SiCl4 post valve closed
11/23/2011	12:47:52 PM	Bypass valve closed
11/23/2011	12:47:52 PM	Bubbler valve closed
11/23/2011	12:47:52 PM	Main Vac valve opened
11/23/2011	12:47:52 PM	Helium MFC set to  0.000000
11/23/2011	12:47:52 PM	H2 MFC set to  0.000000
11/23/2011	12:47:52 PM	BCl3 MFC set to  0.000000
11/23/2011	12:47:52 PM	PHl3 MFC set to  0.000000
11/23/2011	12:47:52 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:47:52 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:47:52 PM	Tube furnace set to 0
11/23/2011	12:48:22 PM	H2 valve closed
11/23/2011	12:48:22 PM	BCl3 valve closed
11/23/2011	12:48:22 PM	PH3 valve closed
11/23/2011	12:48:22 PM	SiCl4 pre valve closed
11/23/2011	12:48:22 PM	SiCl4 post valve closed
11/23/2011	12:48:22 PM	Bypass valve closed
11/23/2011	12:48:22 PM	Bubbler valve closed
11/23/2011	12:48:22 PM	Helium valve opened
11/23/2011	12:48:22 PM	Main Vac valve opened
11/23/2011	12:48:22 PM	Helium MFC set to  20.000000
11/23/2011	12:48:22 PM	H2 MFC set to  0.000000
11/23/2011	12:48:22 PM	BCl3 MFC set to  0.000000
11/23/2011	12:48:22 PM	PHl3 MFC set to  0.000000
11/23/2011	12:48:22 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:48:22 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:48:22 PM	Tube furnace set to 0
11/23/2011	12:48:52 PM	Helium valve closed
11/23/2011	12:48:52 PM	H2 valve closed
11/23/2011	12:48:52 PM	BCl3 valve closed
11/23/2011	12:48:52 PM	PH3 valve closed
11/23/2011	12:48:52 PM	SiCl4 pre valve closed
11/23/2011	12:48:52 PM	SiCl4 post valve closed
11/23/2011	12:48:52 PM	Bypass valve closed
11/23/2011	12:48:52 PM	Bubbler valve closed
11/23/2011	12:48:52 PM	Main Vac valve opened
11/23/2011	12:48:52 PM	Helium MFC set to  0.000000
11/23/2011	12:48:52 PM	H2 MFC set to  0.000000
11/23/2011	12:48:52 PM	BCl3 MFC set to  0.000000
11/23/2011	12:48:52 PM	PHl3 MFC set to  0.000000
11/23/2011	12:48:52 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:48:52 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:48:52 PM	Tube furnace set to 0
11/23/2011	12:49:22 PM	H2 valve closed
11/23/2011	12:49:22 PM	BCl3 valve closed
11/23/2011	12:49:22 PM	PH3 valve closed
11/23/2011	12:49:22 PM	SiCl4 pre valve closed
11/23/2011	12:49:22 PM	SiCl4 post valve closed
11/23/2011	12:49:22 PM	Bypass valve closed
11/23/2011	12:49:22 PM	Bubbler valve closed
11/23/2011	12:49:22 PM	Helium valve opened
11/23/2011	12:49:22 PM	Main Vac valve opened
11/23/2011	12:49:22 PM	Helium MFC set to  20.000000
11/23/2011	12:49:22 PM	H2 MFC set to  0.000000
11/23/2011	12:49:22 PM	BCl3 MFC set to  0.000000
11/23/2011	12:49:22 PM	PHl3 MFC set to  0.000000
11/23/2011	12:49:22 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:49:22 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:49:23 PM	Tube furnace set to 0
11/23/2011	12:49:53 PM	Helium valve closed
11/23/2011	12:49:53 PM	H2 valve closed
11/23/2011	12:49:53 PM	BCl3 valve closed
11/23/2011	12:49:53 PM	PH3 valve closed
11/23/2011	12:49:53 PM	SiCl4 pre valve closed
11/23/2011	12:49:53 PM	SiCl4 post valve closed
11/23/2011	12:49:53 PM	Bypass valve closed
11/23/2011	12:49:53 PM	Bubbler valve closed
11/23/2011	12:49:53 PM	Main Vac valve opened
11/23/2011	12:49:53 PM	Helium MFC set to  0.000000
11/23/2011	12:49:53 PM	H2 MFC set to  0.000000
11/23/2011	12:49:53 PM	BCl3 MFC set to  0.000000
11/23/2011	12:49:53 PM	PHl3 MFC set to  0.000000
11/23/2011	12:49:53 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:49:53 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:49:53 PM	Tube furnace set to 0
11/23/2011	12:50:23 PM	H2 valve closed
11/23/2011	12:50:23 PM	BCl3 valve closed
11/23/2011	12:50:23 PM	PH3 valve closed
11/23/2011	12:50:23 PM	SiCl4 pre valve closed
11/23/2011	12:50:23 PM	SiCl4 post valve closed
11/23/2011	12:50:23 PM	Bypass valve closed
11/23/2011	12:50:23 PM	Bubbler valve closed
11/23/2011	12:50:23 PM	Helium valve opened
11/23/2011	12:50:23 PM	Main Vac valve opened
11/23/2011	12:50:23 PM	Helium MFC set to  20.000000
11/23/2011	12:50:23 PM	H2 MFC set to  0.000000
11/23/2011	12:50:23 PM	BCl3 MFC set to  0.000000
11/23/2011	12:50:23 PM	PHl3 MFC set to  0.000000
11/23/2011	12:50:23 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:50:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:50:23 PM	Tube furnace set to 0
11/23/2011	12:50:53 PM	Helium valve closed
11/23/2011	12:50:53 PM	H2 valve closed
11/23/2011	12:50:53 PM	BCl3 valve closed
11/23/2011	12:50:53 PM	PH3 valve closed
11/23/2011	12:50:53 PM	SiCl4 pre valve closed
11/23/2011	12:50:53 PM	SiCl4 post valve closed
11/23/2011	12:50:53 PM	Bypass valve closed
11/23/2011	12:50:53 PM	Bubbler valve closed
11/23/2011	12:50:53 PM	Main Vac valve opened
11/23/2011	12:50:53 PM	Helium MFC set to  0.000000
11/23/2011	12:50:53 PM	H2 MFC set to  0.000000
11/23/2011	12:50:53 PM	BCl3 MFC set to  0.000000
11/23/2011	12:50:53 PM	PHl3 MFC set to  0.000000
11/23/2011	12:50:53 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:50:53 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:50:53 PM	Tube furnace set to 0
11/23/2011	12:51:23 PM	H2 valve closed
11/23/2011	12:51:23 PM	BCl3 valve closed
11/23/2011	12:51:23 PM	PH3 valve closed
11/23/2011	12:51:23 PM	SiCl4 pre valve closed
11/23/2011	12:51:23 PM	SiCl4 post valve closed
11/23/2011	12:51:23 PM	Bypass valve closed
11/23/2011	12:51:23 PM	Bubbler valve closed
11/23/2011	12:51:23 PM	Helium valve opened
11/23/2011	12:51:23 PM	Main Vac valve opened
11/23/2011	12:51:23 PM	Helium MFC set to  20.000000
11/23/2011	12:51:23 PM	H2 MFC set to  0.000000
11/23/2011	12:51:23 PM	BCl3 MFC set to  0.000000
11/23/2011	12:51:23 PM	PHl3 MFC set to  0.000000
11/23/2011	12:51:23 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:51:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:51:23 PM	Tube furnace set to 0
11/23/2011	12:51:53 PM	Helium valve closed
11/23/2011	12:51:53 PM	H2 valve closed
11/23/2011	12:51:53 PM	BCl3 valve closed
11/23/2011	12:51:53 PM	PH3 valve closed
11/23/2011	12:51:53 PM	SiCl4 pre valve closed
11/23/2011	12:51:53 PM	SiCl4 post valve closed
11/23/2011	12:51:53 PM	Bypass valve closed
11/23/2011	12:51:53 PM	Bubbler valve closed
11/23/2011	12:51:53 PM	Main Vac valve opened
11/23/2011	12:51:53 PM	Helium MFC set to  0.000000
11/23/2011	12:51:53 PM	H2 MFC set to  0.000000
11/23/2011	12:51:53 PM	BCl3 MFC set to  0.000000
11/23/2011	12:51:53 PM	PHl3 MFC set to  0.000000
11/23/2011	12:51:53 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:51:53 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:51:54 PM	Tube furnace set to 0
11/23/2011	12:52:24 PM	H2 valve closed
11/23/2011	12:52:24 PM	BCl3 valve closed
11/23/2011	12:52:24 PM	PH3 valve closed
11/23/2011	12:52:24 PM	SiCl4 pre valve closed
11/23/2011	12:52:24 PM	SiCl4 post valve closed
11/23/2011	12:52:24 PM	Bypass valve closed
11/23/2011	12:52:24 PM	Bubbler valve closed
11/23/2011	12:52:24 PM	Helium valve opened
11/23/2011	12:52:24 PM	Main Vac valve opened
11/23/2011	12:52:24 PM	Helium MFC set to  20.000000
11/23/2011	12:52:24 PM	H2 MFC set to  0.000000
11/23/2011	12:52:24 PM	BCl3 MFC set to  0.000000
11/23/2011	12:52:24 PM	PHl3 MFC set to  0.000000
11/23/2011	12:52:24 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:52:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:52:24 PM	Tube furnace set to 0
11/23/2011	12:52:54 PM	Helium valve closed
11/23/2011	12:52:54 PM	H2 valve closed
11/23/2011	12:52:54 PM	BCl3 valve closed
11/23/2011	12:52:54 PM	PH3 valve closed
11/23/2011	12:52:54 PM	SiCl4 pre valve closed
11/23/2011	12:52:54 PM	SiCl4 post valve closed
11/23/2011	12:52:54 PM	Bypass valve closed
11/23/2011	12:52:54 PM	Bubbler valve closed
11/23/2011	12:52:54 PM	Main Vac valve opened
11/23/2011	12:52:54 PM	Helium MFC set to  0.000000
11/23/2011	12:52:54 PM	H2 MFC set to  0.000000
11/23/2011	12:52:54 PM	BCl3 MFC set to  0.000000
11/23/2011	12:52:54 PM	PHl3 MFC set to  0.000000
11/23/2011	12:52:54 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:52:54 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:52:54 PM	Tube furnace set to 0
11/23/2011	12:53:24 PM	H2 valve closed
11/23/2011	12:53:24 PM	BCl3 valve closed
11/23/2011	12:53:24 PM	PH3 valve closed
11/23/2011	12:53:24 PM	SiCl4 pre valve closed
11/23/2011	12:53:24 PM	SiCl4 post valve closed
11/23/2011	12:53:24 PM	Bypass valve closed
11/23/2011	12:53:24 PM	Bubbler valve closed
11/23/2011	12:53:24 PM	Helium valve opened
11/23/2011	12:53:24 PM	Main Vac valve opened
11/23/2011	12:53:24 PM	Helium MFC set to  20.000000
11/23/2011	12:53:24 PM	H2 MFC set to  0.000000
11/23/2011	12:53:24 PM	BCl3 MFC set to  0.000000
11/23/2011	12:53:24 PM	PHl3 MFC set to  0.000000
11/23/2011	12:53:24 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:53:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:53:24 PM	Tube furnace set to 0
11/23/2011	12:53:54 PM	Helium valve closed
11/23/2011	12:53:54 PM	H2 valve closed
11/23/2011	12:53:54 PM	BCl3 valve closed
11/23/2011	12:53:54 PM	PH3 valve closed
11/23/2011	12:53:54 PM	SiCl4 pre valve closed
11/23/2011	12:53:54 PM	SiCl4 post valve closed
11/23/2011	12:53:54 PM	Bypass valve closed
11/23/2011	12:53:54 PM	Bubbler valve closed
11/23/2011	12:53:54 PM	Main Vac valve opened
11/23/2011	12:53:54 PM	Helium MFC set to  0.000000
11/23/2011	12:53:54 PM	H2 MFC set to  0.000000
11/23/2011	12:53:54 PM	BCl3 MFC set to  0.000000
11/23/2011	12:53:54 PM	PHl3 MFC set to  0.000000
11/23/2011	12:53:54 PM	SiCl4 MFC set to  0.000000
11/23/2011	12:53:54 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	12:53:54 PM	Tube furnace set to 0
11/23/2011	12:53:55 PM	Run finished at 12:53 PM
11/23/2011	12:53:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/23/2011	1:08:59 PM	Main Vac valve closed
11/23/2011	1:09:27 PM	Main Vac valve opened
11/23/2011	1:11:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/23/2011	1:11:21 PM	Recipe started at 1:11 PM
11/23/2011	1:11:21 PM	Helium valve closed
11/23/2011	1:11:21 PM	H2 valve closed
11/23/2011	1:11:21 PM	BCl3 valve closed
11/23/2011	1:11:21 PM	PH3 valve closed
11/23/2011	1:11:21 PM	SiCl4 pre valve closed
11/23/2011	1:11:21 PM	SiCl4 post valve closed
11/23/2011	1:11:21 PM	Main Vac valve closed
11/23/2011	1:11:21 PM	Bypass valve closed
11/23/2011	1:11:21 PM	Bubbler valve closed
11/23/2011	1:11:21 PM	Helium MFC set to  0.000000
11/23/2011	1:11:21 PM	H2 MFC set to  0.000000
11/23/2011	1:11:21 PM	BCl3 MFC set to  0.000000
11/23/2011	1:11:21 PM	PHl3 MFC set to  0.000000
11/23/2011	1:11:21 PM	SiCl4 MFC set to  0.000000
11/23/2011	1:11:21 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	1:11:21 PM	Tube furnace set to 0
11/23/2011	1:11:22 PM	Run finished at 1:11 PM
11/23/2011	1:11:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/23/2011	1:12:18 PM	Main Vac valve opened
11/23/2011	1:29:25 PM	Recipe started at 1:29 PM
11/23/2011	1:29:25 PM	Helium valve closed
11/23/2011	1:29:25 PM	H2 valve closed
11/23/2011	1:29:25 PM	BCl3 valve closed
11/23/2011	1:29:25 PM	PH3 valve closed
11/23/2011	1:29:25 PM	SiCl4 pre valve closed
11/23/2011	1:29:25 PM	SiCl4 post valve closed
11/23/2011	1:29:25 PM	Main Vac valve closed
11/23/2011	1:29:25 PM	Bypass valve closed
11/23/2011	1:29:25 PM	Bubbler valve closed
11/23/2011	1:29:25 PM	Helium MFC set to  0.000000
11/23/2011	1:29:25 PM	H2 MFC set to  0.000000
11/23/2011	1:29:25 PM	BCl3 MFC set to  0.000000
11/23/2011	1:29:25 PM	PHl3 MFC set to  0.000000
11/23/2011	1:29:25 PM	SiCl4 MFC set to  0.000000
11/23/2011	1:29:25 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	1:29:25 PM	Tube furnace set to 0
11/23/2011	1:29:28 PM	Helium valve closed
11/23/2011	1:29:28 PM	BCl3 valve closed
11/23/2011	1:29:28 PM	PH3 valve closed
11/23/2011	1:29:28 PM	SiCl4 pre valve closed
11/23/2011	1:29:28 PM	SiCl4 post valve closed
11/23/2011	1:29:28 PM	Main Vac valve closed
11/23/2011	1:29:28 PM	Bypass valve closed
11/23/2011	1:29:28 PM	Bubbler valve closed
11/23/2011	1:29:28 PM	H2 valve opened
11/23/2011	1:29:28 PM	Helium MFC set to  0.000000
11/23/2011	1:29:28 PM	H2 MFC set to  500.000000
11/23/2011	1:29:28 PM	BCl3 MFC set to  0.000000
11/23/2011	1:29:28 PM	PHl3 MFC set to  0.000000
11/23/2011	1:29:28 PM	SiCl4 MFC set to  0.000000
11/23/2011	1:29:28 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	1:29:28 PM	Tube furnace set to 0
11/23/2011	1:30:37 PM	Helium valve closed
11/23/2011	1:30:37 PM	BCl3 valve closed
11/23/2011	1:30:37 PM	PH3 valve closed
11/23/2011	1:30:37 PM	SiCl4 pre valve closed
11/23/2011	1:30:37 PM	SiCl4 post valve closed
11/23/2011	1:30:37 PM	Main Vac valve closed
11/23/2011	1:30:37 PM	Bypass valve closed
11/23/2011	1:30:37 PM	H2 valve opened
11/23/2011	1:30:37 PM	Bubbler valve opened
11/23/2011	1:30:37 PM	Helium MFC set to  0.000000
11/23/2011	1:30:37 PM	H2 MFC set to  500.000000
11/23/2011	1:30:37 PM	BCl3 MFC set to  0.000000
11/23/2011	1:30:37 PM	PHl3 MFC set to  0.000000
11/23/2011	1:30:37 PM	SiCl4 MFC set to  0.000000
11/23/2011	1:30:37 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	1:30:38 PM	Tube furnace set to 0
11/23/2011	1:30:39 PM	Helium valve closed
11/23/2011	1:30:39 PM	BCl3 valve closed
11/23/2011	1:30:39 PM	PH3 valve closed
11/23/2011	1:30:39 PM	SiCl4 pre valve closed
11/23/2011	1:30:39 PM	SiCl4 post valve closed
11/23/2011	1:30:39 PM	Main Vac valve closed
11/23/2011	1:30:39 PM	Bypass valve closed
11/23/2011	1:30:39 PM	H2 valve opened
11/23/2011	1:30:39 PM	Bubbler valve opened
11/23/2011	1:30:39 PM	Helium MFC set to  0.000000
11/23/2011	1:30:39 PM	H2 MFC set to  500.000000
11/23/2011	1:30:39 PM	BCl3 MFC set to  0.000000
11/23/2011	1:30:39 PM	PHl3 MFC set to  0.000000
11/23/2011	1:30:39 PM	SiCl4 MFC set to  0.000000
11/23/2011	1:30:39 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	1:30:39 PM	Tube furnace set to 1000
11/23/2011	1:53:39 PM	Helium valve closed
11/23/2011	1:53:39 PM	PH3 valve closed
11/23/2011	1:53:39 PM	Main Vac valve closed
11/23/2011	1:53:39 PM	Bypass valve closed
11/23/2011	1:53:39 PM	H2 valve opened
11/23/2011	1:53:39 PM	BCl3 valve opened
11/23/2011	1:53:39 PM	SiCl4 pre valve opened
11/23/2011	1:53:39 PM	SiCl4 post valve opened
11/23/2011	1:53:39 PM	Bubbler valve opened
11/23/2011	1:53:39 PM	Helium MFC set to  0.000000
11/23/2011	1:53:39 PM	H2 MFC set to  495.000000
11/23/2011	1:53:39 PM	BCl3 MFC set to  1.000000
11/23/2011	1:53:39 PM	PHl3 MFC set to  0.000000
11/23/2011	1:53:39 PM	SiCl4 MFC set to  25.000000
11/23/2011	1:53:39 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	1:53:39 PM	Tube furnace set to 1000
11/23/2011	2:13:39 PM	Helium valve closed
11/23/2011	2:13:39 PM	BCl3 valve closed
11/23/2011	2:13:39 PM	PH3 valve closed
11/23/2011	2:13:39 PM	SiCl4 pre valve closed
11/23/2011	2:13:39 PM	SiCl4 post valve closed
11/23/2011	2:13:39 PM	Main Vac valve closed
11/23/2011	2:13:39 PM	Bypass valve closed
11/23/2011	2:13:39 PM	H2 valve opened
11/23/2011	2:13:39 PM	Bubbler valve opened
11/23/2011	2:13:39 PM	Helium MFC set to  0.000000
11/23/2011	2:13:39 PM	H2 MFC set to  500.000000
11/23/2011	2:13:39 PM	BCl3 MFC set to  0.000000
11/23/2011	2:13:39 PM	PHl3 MFC set to  0.000000
11/23/2011	2:13:39 PM	SiCl4 MFC set to  0.000000
11/23/2011	2:13:39 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	2:13:39 PM	Tube furnace set to 750
11/23/2011	2:18:39 PM	H2 valve closed
11/23/2011	2:18:39 PM	BCl3 valve closed
11/23/2011	2:18:39 PM	PH3 valve closed
11/23/2011	2:18:39 PM	SiCl4 pre valve closed
11/23/2011	2:18:39 PM	SiCl4 post valve closed
11/23/2011	2:18:39 PM	Main Vac valve closed
11/23/2011	2:18:39 PM	Bypass valve closed
11/23/2011	2:18:39 PM	Helium valve opened
11/23/2011	2:18:39 PM	Bubbler valve opened
11/23/2011	2:18:39 PM	Helium MFC set to  500.000000
11/23/2011	2:18:39 PM	H2 MFC set to  0.000000
11/23/2011	2:18:39 PM	BCl3 MFC set to  0.000000
11/23/2011	2:18:39 PM	PHl3 MFC set to  0.000000
11/23/2011	2:18:39 PM	SiCl4 MFC set to  0.000000
11/23/2011	2:18:39 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	2:18:39 PM	Tube furnace set to 0
11/23/2011	2:38:39 PM	Helium valve closed
11/23/2011	2:38:39 PM	H2 valve closed
11/23/2011	2:38:39 PM	BCl3 valve closed
11/23/2011	2:38:39 PM	PH3 valve closed
11/23/2011	2:38:39 PM	SiCl4 pre valve closed
11/23/2011	2:38:39 PM	SiCl4 post valve closed
11/23/2011	2:38:39 PM	Main Vac valve closed
11/23/2011	2:38:39 PM	Bypass valve closed
11/23/2011	2:38:39 PM	Bubbler valve closed
11/23/2011	2:38:39 PM	Helium MFC set to  0.000000
11/23/2011	2:38:39 PM	H2 MFC set to  0.000000
11/23/2011	2:38:39 PM	BCl3 MFC set to  0.000000
11/23/2011	2:38:39 PM	PHl3 MFC set to  0.000000
11/23/2011	2:38:39 PM	SiCl4 MFC set to  0.000000
11/23/2011	2:38:39 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	2:38:39 PM	Tube furnace set to 0
11/23/2011	2:38:40 PM	Run finished at 2:38 PM
11/23/2011	2:47:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2011	2:47:41 PM	Recipe started at 2:47 PM
11/23/2011	2:47:41 PM	Helium valve closed
11/23/2011	2:47:41 PM	H2 valve closed
11/23/2011	2:47:41 PM	BCl3 valve closed
11/23/2011	2:47:41 PM	PH3 valve closed
11/23/2011	2:47:41 PM	SiCl4 pre valve closed
11/23/2011	2:47:41 PM	SiCl4 post valve closed
11/23/2011	2:47:41 PM	Main Vac valve closed
11/23/2011	2:47:41 PM	Bypass valve closed
11/23/2011	2:47:41 PM	Bubbler valve closed
11/23/2011	2:47:41 PM	Helium MFC set to  0.000000
11/23/2011	2:47:41 PM	H2 MFC set to  0.000000
11/23/2011	2:47:41 PM	BCl3 MFC set to  0.000000
11/23/2011	2:47:41 PM	PHl3 MFC set to  0.000000
11/23/2011	2:47:41 PM	SiCl4 MFC set to  0.000000
11/23/2011	2:47:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	2:47:41 PM	Tube furnace set to 0
11/23/2011	2:47:44 PM	H2 valve closed
11/23/2011	2:47:44 PM	BCl3 valve closed
11/23/2011	2:47:44 PM	PH3 valve closed
11/23/2011	2:47:44 PM	SiCl4 pre valve closed
11/23/2011	2:47:44 PM	SiCl4 post valve closed
11/23/2011	2:47:44 PM	Main Vac valve closed
11/23/2011	2:47:44 PM	Bypass valve closed
11/23/2011	2:47:44 PM	Bubbler valve closed
11/23/2011	2:47:44 PM	Helium valve opened
11/23/2011	2:47:44 PM	Helium MFC set to  500.000000
11/23/2011	2:47:44 PM	H2 MFC set to  0.000000
11/23/2011	2:47:44 PM	BCl3 MFC set to  0.000000
11/23/2011	2:47:44 PM	PHl3 MFC set to  0.000000
11/23/2011	2:47:44 PM	SiCl4 MFC set to  0.000000
11/23/2011	2:47:44 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	2:47:45 PM	Tube furnace set to 0
11/23/2011	2:47:45 PM	Helium valve closed
11/23/2011	2:47:45 PM	H2 valve closed
11/23/2011	2:47:45 PM	BCl3 valve closed
11/23/2011	2:47:45 PM	PH3 valve closed
11/23/2011	2:47:45 PM	SiCl4 pre valve closed
11/23/2011	2:47:45 PM	SiCl4 post valve closed
11/23/2011	2:47:45 PM	Main Vac valve closed
11/23/2011	2:47:45 PM	Bypass valve closed
11/23/2011	2:47:45 PM	Bubbler valve closed
11/23/2011	2:47:45 PM	Helium MFC set to  0.000000
11/23/2011	2:47:45 PM	H2 MFC set to  0.000000
11/23/2011	2:47:45 PM	BCl3 MFC set to  0.000000
11/23/2011	2:47:45 PM	PHl3 MFC set to  0.000000
11/23/2011	2:47:45 PM	SiCl4 MFC set to  0.000000
11/23/2011	2:47:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	2:47:45 PM	Tube furnace set to 0
11/23/2011	2:47:46 PM	Run finished at 2:47 PM
11/23/2011	2:47:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/23/2011	2:59:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	2:59:34 PM	Recipe started at 2:59 PM
11/23/2011	2:59:34 PM	Helium valve closed
11/23/2011	2:59:34 PM	H2 valve closed
11/23/2011	2:59:34 PM	BCl3 valve closed
11/23/2011	2:59:34 PM	PH3 valve closed
11/23/2011	2:59:34 PM	SiCl4 pre valve closed
11/23/2011	2:59:34 PM	SiCl4 post valve closed
11/23/2011	2:59:34 PM	Main Vac valve closed
11/23/2011	2:59:34 PM	Bubbler valve closed
11/23/2011	2:59:34 PM	Bypass valve opened
11/23/2011	2:59:34 PM	Helium MFC set to  0.000000
11/23/2011	2:59:34 PM	H2 MFC set to  0.000000
11/23/2011	2:59:34 PM	BCl3 MFC set to  0.000000
11/23/2011	2:59:34 PM	PHl3 MFC set to  0.000000
11/23/2011	2:59:34 PM	SiCl4 MFC set to  0.000000
11/23/2011	2:59:34 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	2:59:34 PM	Tube furnace set to 0
11/23/2011	3:00:41 PM	Helium valve closed
11/23/2011	3:00:41 PM	H2 valve closed
11/23/2011	3:00:41 PM	BCl3 valve closed
11/23/2011	3:00:41 PM	PH3 valve closed
11/23/2011	3:00:41 PM	SiCl4 pre valve closed
11/23/2011	3:00:41 PM	SiCl4 post valve closed
11/23/2011	3:00:41 PM	Main Vac valve closed
11/23/2011	3:00:41 PM	Bubbler valve closed
11/23/2011	3:00:41 PM	Bypass valve opened
11/23/2011	3:00:41 PM	Helium MFC set to  0.000000
11/23/2011	3:00:41 PM	H2 MFC set to  0.000000
11/23/2011	3:00:41 PM	BCl3 MFC set to  0.000000
11/23/2011	3:00:41 PM	PHl3 MFC set to  0.000000
11/23/2011	3:00:41 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:00:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:00:42 PM	Tube furnace set to 0
11/23/2011	3:01:42 PM	Helium valve closed
11/23/2011	3:01:42 PM	H2 valve closed
11/23/2011	3:01:42 PM	BCl3 valve closed
11/23/2011	3:01:42 PM	PH3 valve closed
11/23/2011	3:01:42 PM	SiCl4 pre valve closed
11/23/2011	3:01:42 PM	SiCl4 post valve closed
11/23/2011	3:01:42 PM	Bypass valve closed
11/23/2011	3:01:42 PM	Bubbler valve closed
11/23/2011	3:01:42 PM	Main Vac valve opened
11/23/2011	3:01:42 PM	Helium MFC set to  0.000000
11/23/2011	3:01:42 PM	H2 MFC set to  0.000000
11/23/2011	3:01:42 PM	BCl3 MFC set to  0.000000
11/23/2011	3:01:42 PM	PHl3 MFC set to  0.000000
11/23/2011	3:01:42 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:01:42 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:01:42 PM	Tube furnace set to 0
11/23/2011	3:01:43 PM	Run finished at 3:01 PM
11/23/2011	3:01:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	3:06:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/23/2011	3:06:27 PM	Recipe started at 3:06 PM
11/23/2011	3:06:27 PM	Helium valve closed
11/23/2011	3:06:27 PM	H2 valve closed
11/23/2011	3:06:27 PM	BCl3 valve closed
11/23/2011	3:06:27 PM	PH3 valve closed
11/23/2011	3:06:27 PM	SiCl4 pre valve closed
11/23/2011	3:06:27 PM	SiCl4 post valve closed
11/23/2011	3:06:27 PM	Main Vac valve closed
11/23/2011	3:06:27 PM	Bubbler valve closed
11/23/2011	3:06:27 PM	Bypass valve opened
11/23/2011	3:06:27 PM	Helium MFC set to  0.000000
11/23/2011	3:06:27 PM	H2 MFC set to  0.000000
11/23/2011	3:06:27 PM	BCl3 MFC set to  0.000000
11/23/2011	3:06:27 PM	PHl3 MFC set to  0.000000
11/23/2011	3:06:27 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:06:27 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:06:27 PM	Tube furnace set to 0
11/23/2011	3:06:27 PM	Helium valve closed
11/23/2011	3:06:27 PM	H2 valve closed
11/23/2011	3:06:27 PM	BCl3 valve closed
11/23/2011	3:06:27 PM	PH3 valve closed
11/23/2011	3:06:27 PM	SiCl4 pre valve closed
11/23/2011	3:06:27 PM	SiCl4 post valve closed
11/23/2011	3:06:27 PM	Main Vac valve closed
11/23/2011	3:06:27 PM	Bubbler valve closed
11/23/2011	3:06:27 PM	Bypass valve opened
11/23/2011	3:06:27 PM	Helium MFC set to  0.000000
11/23/2011	3:06:27 PM	H2 MFC set to  0.000000
11/23/2011	3:06:27 PM	BCl3 MFC set to  0.000000
11/23/2011	3:06:27 PM	PHl3 MFC set to  0.000000
11/23/2011	3:06:27 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:06:27 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:06:27 PM	Tube furnace set to 0
11/23/2011	3:06:37 PM	Helium valve closed
11/23/2011	3:06:37 PM	H2 valve closed
11/23/2011	3:06:37 PM	BCl3 valve closed
11/23/2011	3:06:37 PM	PH3 valve closed
11/23/2011	3:06:37 PM	SiCl4 pre valve closed
11/23/2011	3:06:37 PM	SiCl4 post valve closed
11/23/2011	3:06:37 PM	Bypass valve closed
11/23/2011	3:06:37 PM	Bubbler valve closed
11/23/2011	3:06:37 PM	Main Vac valve opened
11/23/2011	3:06:37 PM	Helium MFC set to  0.000000
11/23/2011	3:06:37 PM	H2 MFC set to  0.000000
11/23/2011	3:06:37 PM	BCl3 MFC set to  0.000000
11/23/2011	3:06:37 PM	PHl3 MFC set to  0.000000
11/23/2011	3:06:37 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:06:37 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:06:37 PM	Tube furnace set to 0
11/23/2011	3:07:07 PM	H2 valve closed
11/23/2011	3:07:07 PM	BCl3 valve closed
11/23/2011	3:07:07 PM	PH3 valve closed
11/23/2011	3:07:07 PM	SiCl4 pre valve closed
11/23/2011	3:07:07 PM	SiCl4 post valve closed
11/23/2011	3:07:07 PM	Bypass valve closed
11/23/2011	3:07:07 PM	Bubbler valve closed
11/23/2011	3:07:07 PM	Helium valve opened
11/23/2011	3:07:07 PM	Main Vac valve opened
11/23/2011	3:07:07 PM	Helium MFC set to  20.000000
11/23/2011	3:07:07 PM	H2 MFC set to  0.000000
11/23/2011	3:07:08 PM	BCl3 MFC set to  0.000000
11/23/2011	3:07:08 PM	PHl3 MFC set to  0.000000
11/23/2011	3:07:08 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:07:08 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:07:08 PM	Tube furnace set to 0
11/23/2011	3:07:38 PM	Helium valve closed
11/23/2011	3:07:38 PM	H2 valve closed
11/23/2011	3:07:38 PM	BCl3 valve closed
11/23/2011	3:07:38 PM	PH3 valve closed
11/23/2011	3:07:38 PM	SiCl4 pre valve closed
11/23/2011	3:07:38 PM	SiCl4 post valve closed
11/23/2011	3:07:38 PM	Bypass valve closed
11/23/2011	3:07:38 PM	Bubbler valve closed
11/23/2011	3:07:38 PM	Main Vac valve opened
11/23/2011	3:07:38 PM	Helium MFC set to  0.000000
11/23/2011	3:07:38 PM	H2 MFC set to  0.000000
11/23/2011	3:07:38 PM	BCl3 MFC set to  0.000000
11/23/2011	3:07:38 PM	PHl3 MFC set to  0.000000
11/23/2011	3:07:38 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:07:38 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:07:38 PM	Tube furnace set to 0
11/23/2011	3:08:08 PM	H2 valve closed
11/23/2011	3:08:08 PM	BCl3 valve closed
11/23/2011	3:08:08 PM	PH3 valve closed
11/23/2011	3:08:08 PM	SiCl4 pre valve closed
11/23/2011	3:08:08 PM	SiCl4 post valve closed
11/23/2011	3:08:08 PM	Bypass valve closed
11/23/2011	3:08:08 PM	Bubbler valve closed
11/23/2011	3:08:08 PM	Helium valve opened
11/23/2011	3:08:08 PM	Main Vac valve opened
11/23/2011	3:08:08 PM	Helium MFC set to  20.000000
11/23/2011	3:08:08 PM	H2 MFC set to  0.000000
11/23/2011	3:08:08 PM	BCl3 MFC set to  0.000000
11/23/2011	3:08:08 PM	PHl3 MFC set to  0.000000
11/23/2011	3:08:08 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:08:08 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:08:08 PM	Tube furnace set to 0
11/23/2011	3:08:38 PM	Helium valve closed
11/23/2011	3:08:38 PM	H2 valve closed
11/23/2011	3:08:38 PM	BCl3 valve closed
11/23/2011	3:08:38 PM	PH3 valve closed
11/23/2011	3:08:38 PM	SiCl4 pre valve closed
11/23/2011	3:08:38 PM	SiCl4 post valve closed
11/23/2011	3:08:38 PM	Bypass valve closed
11/23/2011	3:08:38 PM	Bubbler valve closed
11/23/2011	3:08:38 PM	Main Vac valve opened
11/23/2011	3:08:38 PM	Helium MFC set to  0.000000
11/23/2011	3:08:38 PM	H2 MFC set to  0.000000
11/23/2011	3:08:38 PM	BCl3 MFC set to  0.000000
11/23/2011	3:08:38 PM	PHl3 MFC set to  0.000000
11/23/2011	3:08:38 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:08:38 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:08:38 PM	Tube furnace set to 0
11/23/2011	3:09:08 PM	H2 valve closed
11/23/2011	3:09:08 PM	BCl3 valve closed
11/23/2011	3:09:08 PM	PH3 valve closed
11/23/2011	3:09:08 PM	SiCl4 pre valve closed
11/23/2011	3:09:08 PM	SiCl4 post valve closed
11/23/2011	3:09:08 PM	Bypass valve closed
11/23/2011	3:09:08 PM	Bubbler valve closed
11/23/2011	3:09:08 PM	Helium valve opened
11/23/2011	3:09:08 PM	Main Vac valve opened
11/23/2011	3:09:08 PM	Helium MFC set to  20.000000
11/23/2011	3:09:08 PM	H2 MFC set to  0.000000
11/23/2011	3:09:08 PM	BCl3 MFC set to  0.000000
11/23/2011	3:09:08 PM	PHl3 MFC set to  0.000000
11/23/2011	3:09:08 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:09:08 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:09:08 PM	Tube furnace set to 0
11/23/2011	3:09:38 PM	Helium valve closed
11/23/2011	3:09:38 PM	H2 valve closed
11/23/2011	3:09:38 PM	BCl3 valve closed
11/23/2011	3:09:38 PM	PH3 valve closed
11/23/2011	3:09:38 PM	SiCl4 pre valve closed
11/23/2011	3:09:38 PM	SiCl4 post valve closed
11/23/2011	3:09:38 PM	Bypass valve closed
11/23/2011	3:09:38 PM	Bubbler valve closed
11/23/2011	3:09:38 PM	Main Vac valve opened
11/23/2011	3:09:38 PM	Helium MFC set to  0.000000
11/23/2011	3:09:38 PM	H2 MFC set to  0.000000
11/23/2011	3:09:38 PM	BCl3 MFC set to  0.000000
11/23/2011	3:09:38 PM	PHl3 MFC set to  0.000000
11/23/2011	3:09:38 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:09:38 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:09:39 PM	Tube furnace set to 0
11/23/2011	3:10:09 PM	H2 valve closed
11/23/2011	3:10:09 PM	BCl3 valve closed
11/23/2011	3:10:09 PM	PH3 valve closed
11/23/2011	3:10:09 PM	SiCl4 pre valve closed
11/23/2011	3:10:09 PM	SiCl4 post valve closed
11/23/2011	3:10:09 PM	Bypass valve closed
11/23/2011	3:10:09 PM	Bubbler valve closed
11/23/2011	3:10:09 PM	Helium valve opened
11/23/2011	3:10:09 PM	Main Vac valve opened
11/23/2011	3:10:09 PM	Helium MFC set to  20.000000
11/23/2011	3:10:09 PM	H2 MFC set to  0.000000
11/23/2011	3:10:09 PM	BCl3 MFC set to  0.000000
11/23/2011	3:10:09 PM	PHl3 MFC set to  0.000000
11/23/2011	3:10:09 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:10:09 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:10:09 PM	Tube furnace set to 0
11/23/2011	3:10:39 PM	Helium valve closed
11/23/2011	3:10:39 PM	H2 valve closed
11/23/2011	3:10:39 PM	BCl3 valve closed
11/23/2011	3:10:39 PM	PH3 valve closed
11/23/2011	3:10:39 PM	SiCl4 pre valve closed
11/23/2011	3:10:39 PM	SiCl4 post valve closed
11/23/2011	3:10:39 PM	Bypass valve closed
11/23/2011	3:10:39 PM	Bubbler valve closed
11/23/2011	3:10:39 PM	Main Vac valve opened
11/23/2011	3:10:39 PM	Helium MFC set to  0.000000
11/23/2011	3:10:39 PM	H2 MFC set to  0.000000
11/23/2011	3:10:39 PM	BCl3 MFC set to  0.000000
11/23/2011	3:10:39 PM	PHl3 MFC set to  0.000000
11/23/2011	3:10:39 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:10:39 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:10:39 PM	Tube furnace set to 0
11/23/2011	3:11:09 PM	H2 valve closed
11/23/2011	3:11:09 PM	BCl3 valve closed
11/23/2011	3:11:09 PM	PH3 valve closed
11/23/2011	3:11:09 PM	SiCl4 pre valve closed
11/23/2011	3:11:09 PM	SiCl4 post valve closed
11/23/2011	3:11:09 PM	Bypass valve closed
11/23/2011	3:11:09 PM	Bubbler valve closed
11/23/2011	3:11:09 PM	Helium valve opened
11/23/2011	3:11:09 PM	Main Vac valve opened
11/23/2011	3:11:09 PM	Helium MFC set to  20.000000
11/23/2011	3:11:09 PM	H2 MFC set to  0.000000
11/23/2011	3:11:09 PM	BCl3 MFC set to  0.000000
11/23/2011	3:11:09 PM	PHl3 MFC set to  0.000000
11/23/2011	3:11:09 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:11:09 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:11:09 PM	Tube furnace set to 0
11/23/2011	3:11:39 PM	Helium valve closed
11/23/2011	3:11:39 PM	H2 valve closed
11/23/2011	3:11:39 PM	BCl3 valve closed
11/23/2011	3:11:39 PM	PH3 valve closed
11/23/2011	3:11:39 PM	SiCl4 pre valve closed
11/23/2011	3:11:39 PM	SiCl4 post valve closed
11/23/2011	3:11:39 PM	Bypass valve closed
11/23/2011	3:11:39 PM	Bubbler valve closed
11/23/2011	3:11:39 PM	Main Vac valve opened
11/23/2011	3:11:39 PM	Helium MFC set to  0.000000
11/23/2011	3:11:39 PM	H2 MFC set to  0.000000
11/23/2011	3:11:39 PM	BCl3 MFC set to  0.000000
11/23/2011	3:11:39 PM	PHl3 MFC set to  0.000000
11/23/2011	3:11:39 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:11:39 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:11:39 PM	Tube furnace set to 0
11/23/2011	3:12:09 PM	H2 valve closed
11/23/2011	3:12:09 PM	BCl3 valve closed
11/23/2011	3:12:09 PM	PH3 valve closed
11/23/2011	3:12:09 PM	SiCl4 pre valve closed
11/23/2011	3:12:09 PM	SiCl4 post valve closed
11/23/2011	3:12:09 PM	Bypass valve closed
11/23/2011	3:12:09 PM	Bubbler valve closed
11/23/2011	3:12:09 PM	Helium valve opened
11/23/2011	3:12:09 PM	Main Vac valve opened
11/23/2011	3:12:09 PM	Helium MFC set to  20.000000
11/23/2011	3:12:10 PM	H2 MFC set to  0.000000
11/23/2011	3:12:10 PM	BCl3 MFC set to  0.000000
11/23/2011	3:12:10 PM	PHl3 MFC set to  0.000000
11/23/2011	3:12:10 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:12:10 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:12:10 PM	Tube furnace set to 0
11/23/2011	3:12:40 PM	Helium valve closed
11/23/2011	3:12:40 PM	H2 valve closed
11/23/2011	3:12:40 PM	BCl3 valve closed
11/23/2011	3:12:40 PM	PH3 valve closed
11/23/2011	3:12:40 PM	SiCl4 pre valve closed
11/23/2011	3:12:40 PM	SiCl4 post valve closed
11/23/2011	3:12:40 PM	Bypass valve closed
11/23/2011	3:12:40 PM	Bubbler valve closed
11/23/2011	3:12:40 PM	Main Vac valve opened
11/23/2011	3:12:40 PM	Helium MFC set to  0.000000
11/23/2011	3:12:40 PM	H2 MFC set to  0.000000
11/23/2011	3:12:40 PM	BCl3 MFC set to  0.000000
11/23/2011	3:12:40 PM	PHl3 MFC set to  0.000000
11/23/2011	3:12:40 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:12:40 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:12:40 PM	Tube furnace set to 0
11/23/2011	3:13:10 PM	H2 valve closed
11/23/2011	3:13:10 PM	BCl3 valve closed
11/23/2011	3:13:10 PM	PH3 valve closed
11/23/2011	3:13:10 PM	SiCl4 pre valve closed
11/23/2011	3:13:10 PM	SiCl4 post valve closed
11/23/2011	3:13:10 PM	Bypass valve closed
11/23/2011	3:13:10 PM	Bubbler valve closed
11/23/2011	3:13:10 PM	Helium valve opened
11/23/2011	3:13:10 PM	Main Vac valve opened
11/23/2011	3:13:10 PM	Helium MFC set to  20.000000
11/23/2011	3:13:10 PM	H2 MFC set to  0.000000
11/23/2011	3:13:10 PM	BCl3 MFC set to  0.000000
11/23/2011	3:13:10 PM	PHl3 MFC set to  0.000000
11/23/2011	3:13:10 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:13:10 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:13:10 PM	Tube furnace set to 0
11/23/2011	3:13:40 PM	Helium valve closed
11/23/2011	3:13:40 PM	H2 valve closed
11/23/2011	3:13:40 PM	BCl3 valve closed
11/23/2011	3:13:40 PM	PH3 valve closed
11/23/2011	3:13:40 PM	SiCl4 pre valve closed
11/23/2011	3:13:40 PM	SiCl4 post valve closed
11/23/2011	3:13:40 PM	Bypass valve closed
11/23/2011	3:13:40 PM	Bubbler valve closed
11/23/2011	3:13:40 PM	Main Vac valve opened
11/23/2011	3:13:40 PM	Helium MFC set to  0.000000
11/23/2011	3:13:40 PM	H2 MFC set to  0.000000
11/23/2011	3:13:40 PM	BCl3 MFC set to  0.000000
11/23/2011	3:13:40 PM	PHl3 MFC set to  0.000000
11/23/2011	3:13:40 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:13:40 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:13:40 PM	Tube furnace set to 0
11/23/2011	3:14:10 PM	H2 valve closed
11/23/2011	3:14:10 PM	BCl3 valve closed
11/23/2011	3:14:10 PM	PH3 valve closed
11/23/2011	3:14:10 PM	SiCl4 pre valve closed
11/23/2011	3:14:10 PM	SiCl4 post valve closed
11/23/2011	3:14:10 PM	Bypass valve closed
11/23/2011	3:14:10 PM	Bubbler valve closed
11/23/2011	3:14:10 PM	Helium valve opened
11/23/2011	3:14:10 PM	Main Vac valve opened
11/23/2011	3:14:10 PM	Helium MFC set to  20.000000
11/23/2011	3:14:10 PM	H2 MFC set to  0.000000
11/23/2011	3:14:10 PM	BCl3 MFC set to  0.000000
11/23/2011	3:14:10 PM	PHl3 MFC set to  0.000000
11/23/2011	3:14:10 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:14:10 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:14:11 PM	Tube furnace set to 0
11/23/2011	3:14:41 PM	Helium valve closed
11/23/2011	3:14:41 PM	H2 valve closed
11/23/2011	3:14:41 PM	BCl3 valve closed
11/23/2011	3:14:41 PM	PH3 valve closed
11/23/2011	3:14:41 PM	SiCl4 pre valve closed
11/23/2011	3:14:41 PM	SiCl4 post valve closed
11/23/2011	3:14:41 PM	Bypass valve closed
11/23/2011	3:14:41 PM	Bubbler valve closed
11/23/2011	3:14:41 PM	Main Vac valve opened
11/23/2011	3:14:41 PM	Helium MFC set to  0.000000
11/23/2011	3:14:41 PM	H2 MFC set to  0.000000
11/23/2011	3:14:41 PM	BCl3 MFC set to  0.000000
11/23/2011	3:14:41 PM	PHl3 MFC set to  0.000000
11/23/2011	3:14:41 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:14:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:14:41 PM	Tube furnace set to 0
11/23/2011	3:15:11 PM	H2 valve closed
11/23/2011	3:15:11 PM	BCl3 valve closed
11/23/2011	3:15:11 PM	PH3 valve closed
11/23/2011	3:15:11 PM	SiCl4 pre valve closed
11/23/2011	3:15:11 PM	SiCl4 post valve closed
11/23/2011	3:15:11 PM	Bypass valve closed
11/23/2011	3:15:11 PM	Bubbler valve closed
11/23/2011	3:15:11 PM	Helium valve opened
11/23/2011	3:15:11 PM	Main Vac valve opened
11/23/2011	3:15:11 PM	Helium MFC set to  20.000000
11/23/2011	3:15:11 PM	H2 MFC set to  0.000000
11/23/2011	3:15:11 PM	BCl3 MFC set to  0.000000
11/23/2011	3:15:11 PM	PHl3 MFC set to  0.000000
11/23/2011	3:15:11 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:15:11 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:15:11 PM	Tube furnace set to 0
11/23/2011	3:15:41 PM	Helium valve closed
11/23/2011	3:15:41 PM	H2 valve closed
11/23/2011	3:15:41 PM	BCl3 valve closed
11/23/2011	3:15:41 PM	PH3 valve closed
11/23/2011	3:15:41 PM	SiCl4 pre valve closed
11/23/2011	3:15:41 PM	SiCl4 post valve closed
11/23/2011	3:15:41 PM	Bypass valve closed
11/23/2011	3:15:41 PM	Bubbler valve closed
11/23/2011	3:15:41 PM	Main Vac valve opened
11/23/2011	3:15:41 PM	Helium MFC set to  0.000000
11/23/2011	3:15:41 PM	H2 MFC set to  0.000000
11/23/2011	3:15:41 PM	BCl3 MFC set to  0.000000
11/23/2011	3:15:41 PM	PHl3 MFC set to  0.000000
11/23/2011	3:15:41 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:15:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:15:41 PM	Tube furnace set to 0
11/23/2011	3:16:11 PM	H2 valve closed
11/23/2011	3:16:11 PM	BCl3 valve closed
11/23/2011	3:16:11 PM	PH3 valve closed
11/23/2011	3:16:11 PM	SiCl4 pre valve closed
11/23/2011	3:16:11 PM	SiCl4 post valve closed
11/23/2011	3:16:11 PM	Bypass valve closed
11/23/2011	3:16:11 PM	Bubbler valve closed
11/23/2011	3:16:11 PM	Helium valve opened
11/23/2011	3:16:11 PM	Main Vac valve opened
11/23/2011	3:16:11 PM	Helium MFC set to  20.000000
11/23/2011	3:16:11 PM	H2 MFC set to  0.000000
11/23/2011	3:16:11 PM	BCl3 MFC set to  0.000000
11/23/2011	3:16:11 PM	PHl3 MFC set to  0.000000
11/23/2011	3:16:11 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:16:11 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:16:11 PM	Tube furnace set to 0
11/23/2011	3:16:41 PM	Helium valve closed
11/23/2011	3:16:41 PM	H2 valve closed
11/23/2011	3:16:41 PM	BCl3 valve closed
11/23/2011	3:16:41 PM	PH3 valve closed
11/23/2011	3:16:41 PM	SiCl4 pre valve closed
11/23/2011	3:16:41 PM	SiCl4 post valve closed
11/23/2011	3:16:41 PM	Bypass valve closed
11/23/2011	3:16:41 PM	Bubbler valve closed
11/23/2011	3:16:41 PM	Main Vac valve opened
11/23/2011	3:16:41 PM	Helium MFC set to  0.000000
11/23/2011	3:16:41 PM	H2 MFC set to  0.000000
11/23/2011	3:16:41 PM	BCl3 MFC set to  0.000000
11/23/2011	3:16:41 PM	PHl3 MFC set to  0.000000
11/23/2011	3:16:41 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:16:41 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:16:42 PM	Tube furnace set to 0
11/23/2011	3:16:43 PM	Run finished at 3:16 PM
11/23/2011	3:16:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/23/2011	3:25:52 PM	Main Vac valve closed
11/23/2011	3:26:10 PM	Main Vac valve opened
11/23/2011	3:26:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/23/2011	3:26:45 PM	Recipe started at 3:26 PM
11/23/2011	3:26:45 PM	Helium valve closed
11/23/2011	3:26:45 PM	H2 valve closed
11/23/2011	3:26:45 PM	BCl3 valve closed
11/23/2011	3:26:45 PM	PH3 valve closed
11/23/2011	3:26:45 PM	SiCl4 pre valve closed
11/23/2011	3:26:45 PM	SiCl4 post valve closed
11/23/2011	3:26:45 PM	Main Vac valve closed
11/23/2011	3:26:45 PM	Bubbler valve closed
11/23/2011	3:26:45 PM	Bypass valve opened
11/23/2011	3:26:45 PM	Helium MFC set to  0.000000
11/23/2011	3:26:45 PM	H2 MFC set to  0.000000
11/23/2011	3:26:45 PM	BCl3 MFC set to  0.000000
11/23/2011	3:26:45 PM	PHl3 MFC set to  0.000000
11/23/2011	3:26:45 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:26:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:26:45 PM	Tube furnace set to 0
11/23/2011	3:26:45 PM	Helium valve closed
11/23/2011	3:26:45 PM	H2 valve closed
11/23/2011	3:26:45 PM	BCl3 valve closed
11/23/2011	3:26:45 PM	PH3 valve closed
11/23/2011	3:26:45 PM	SiCl4 pre valve closed
11/23/2011	3:26:45 PM	SiCl4 post valve closed
11/23/2011	3:26:45 PM	Main Vac valve closed
11/23/2011	3:26:45 PM	Bubbler valve closed
11/23/2011	3:26:45 PM	Bypass valve opened
11/23/2011	3:26:45 PM	Helium MFC set to  0.000000
11/23/2011	3:26:45 PM	H2 MFC set to  0.000000
11/23/2011	3:26:45 PM	BCl3 MFC set to  0.000000
11/23/2011	3:26:45 PM	PHl3 MFC set to  0.000000
11/23/2011	3:26:45 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:26:45 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:26:45 PM	Tube furnace set to 0
11/23/2011	3:26:53 PM	Helium valve closed
11/23/2011	3:26:53 PM	H2 valve closed
11/23/2011	3:26:53 PM	BCl3 valve closed
11/23/2011	3:26:53 PM	PH3 valve closed
11/23/2011	3:26:53 PM	SiCl4 pre valve closed
11/23/2011	3:26:53 PM	SiCl4 post valve closed
11/23/2011	3:26:53 PM	Bypass valve closed
11/23/2011	3:26:53 PM	Bubbler valve closed
11/23/2011	3:26:53 PM	Main Vac valve opened
11/23/2011	3:26:53 PM	Helium MFC set to  0.000000
11/23/2011	3:26:53 PM	H2 MFC set to  0.000000
11/23/2011	3:26:53 PM	BCl3 MFC set to  0.000000
11/23/2011	3:26:53 PM	PHl3 MFC set to  0.000000
11/23/2011	3:26:53 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:26:53 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:26:53 PM	Tube furnace set to 0
11/23/2011	3:27:23 PM	H2 valve closed
11/23/2011	3:27:23 PM	BCl3 valve closed
11/23/2011	3:27:23 PM	PH3 valve closed
11/23/2011	3:27:23 PM	SiCl4 pre valve closed
11/23/2011	3:27:23 PM	SiCl4 post valve closed
11/23/2011	3:27:23 PM	Bypass valve closed
11/23/2011	3:27:23 PM	Bubbler valve closed
11/23/2011	3:27:23 PM	Helium valve opened
11/23/2011	3:27:23 PM	Main Vac valve opened
11/23/2011	3:27:23 PM	Helium MFC set to  20.000000
11/23/2011	3:27:23 PM	H2 MFC set to  0.000000
11/23/2011	3:27:23 PM	BCl3 MFC set to  0.000000
11/23/2011	3:27:23 PM	PHl3 MFC set to  0.000000
11/23/2011	3:27:23 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:27:23 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:27:24 PM	Tube furnace set to 0
11/23/2011	3:27:54 PM	Helium valve closed
11/23/2011	3:27:54 PM	H2 valve closed
11/23/2011	3:27:54 PM	BCl3 valve closed
11/23/2011	3:27:54 PM	PH3 valve closed
11/23/2011	3:27:54 PM	SiCl4 pre valve closed
11/23/2011	3:27:54 PM	SiCl4 post valve closed
11/23/2011	3:27:54 PM	Bypass valve closed
11/23/2011	3:27:54 PM	Bubbler valve closed
11/23/2011	3:27:54 PM	Main Vac valve opened
11/23/2011	3:27:54 PM	Helium MFC set to  0.000000
11/23/2011	3:27:54 PM	H2 MFC set to  0.000000
11/23/2011	3:27:54 PM	BCl3 MFC set to  0.000000
11/23/2011	3:27:54 PM	PHl3 MFC set to  0.000000
11/23/2011	3:27:54 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:27:54 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:27:54 PM	Tube furnace set to 0
11/23/2011	3:28:24 PM	H2 valve closed
11/23/2011	3:28:24 PM	BCl3 valve closed
11/23/2011	3:28:24 PM	PH3 valve closed
11/23/2011	3:28:24 PM	SiCl4 pre valve closed
11/23/2011	3:28:24 PM	SiCl4 post valve closed
11/23/2011	3:28:24 PM	Bypass valve closed
11/23/2011	3:28:24 PM	Bubbler valve closed
11/23/2011	3:28:24 PM	Helium valve opened
11/23/2011	3:28:24 PM	Main Vac valve opened
11/23/2011	3:28:24 PM	Helium MFC set to  20.000000
11/23/2011	3:28:24 PM	H2 MFC set to  0.000000
11/23/2011	3:28:24 PM	BCl3 MFC set to  0.000000
11/23/2011	3:28:24 PM	PHl3 MFC set to  0.000000
11/23/2011	3:28:24 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:28:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:28:24 PM	Tube furnace set to 0
11/23/2011	3:28:54 PM	Helium valve closed
11/23/2011	3:28:54 PM	H2 valve closed
11/23/2011	3:28:54 PM	BCl3 valve closed
11/23/2011	3:28:54 PM	PH3 valve closed
11/23/2011	3:28:54 PM	SiCl4 pre valve closed
11/23/2011	3:28:54 PM	SiCl4 post valve closed
11/23/2011	3:28:54 PM	Bypass valve closed
11/23/2011	3:28:54 PM	Bubbler valve closed
11/23/2011	3:28:54 PM	Main Vac valve opened
11/23/2011	3:28:54 PM	Helium MFC set to  0.000000
11/23/2011	3:28:54 PM	H2 MFC set to  0.000000
11/23/2011	3:28:54 PM	BCl3 MFC set to  0.000000
11/23/2011	3:28:54 PM	PHl3 MFC set to  0.000000
11/23/2011	3:28:54 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:28:54 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:28:54 PM	Tube furnace set to 0
11/23/2011	3:29:24 PM	H2 valve closed
11/23/2011	3:29:24 PM	BCl3 valve closed
11/23/2011	3:29:24 PM	PH3 valve closed
11/23/2011	3:29:24 PM	SiCl4 pre valve closed
11/23/2011	3:29:24 PM	SiCl4 post valve closed
11/23/2011	3:29:24 PM	Bypass valve closed
11/23/2011	3:29:24 PM	Bubbler valve closed
11/23/2011	3:29:24 PM	Helium valve opened
11/23/2011	3:29:24 PM	Main Vac valve opened
11/23/2011	3:29:24 PM	Helium MFC set to  20.000000
11/23/2011	3:29:24 PM	H2 MFC set to  0.000000
11/23/2011	3:29:24 PM	BCl3 MFC set to  0.000000
11/23/2011	3:29:24 PM	PHl3 MFC set to  0.000000
11/23/2011	3:29:24 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:29:24 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:29:24 PM	Tube furnace set to 0
11/23/2011	3:29:54 PM	Helium valve closed
11/23/2011	3:29:54 PM	H2 valve closed
11/23/2011	3:29:54 PM	BCl3 valve closed
11/23/2011	3:29:54 PM	PH3 valve closed
11/23/2011	3:29:54 PM	SiCl4 pre valve closed
11/23/2011	3:29:54 PM	SiCl4 post valve closed
11/23/2011	3:29:54 PM	Bypass valve closed
11/23/2011	3:29:54 PM	Bubbler valve closed
11/23/2011	3:29:54 PM	Main Vac valve opened
11/23/2011	3:29:54 PM	Helium MFC set to  0.000000
11/23/2011	3:29:54 PM	H2 MFC set to  0.000000
11/23/2011	3:29:54 PM	BCl3 MFC set to  0.000000
11/23/2011	3:29:54 PM	PHl3 MFC set to  0.000000
11/23/2011	3:29:54 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:29:54 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:29:55 PM	Tube furnace set to 0
11/23/2011	3:30:25 PM	H2 valve closed
11/23/2011	3:30:25 PM	BCl3 valve closed
11/23/2011	3:30:25 PM	PH3 valve closed
11/23/2011	3:30:25 PM	SiCl4 pre valve closed
11/23/2011	3:30:25 PM	SiCl4 post valve closed
11/23/2011	3:30:25 PM	Bypass valve closed
11/23/2011	3:30:25 PM	Bubbler valve closed
11/23/2011	3:30:25 PM	Helium valve opened
11/23/2011	3:30:25 PM	Main Vac valve opened
11/23/2011	3:30:25 PM	Helium MFC set to  20.000000
11/23/2011	3:30:25 PM	H2 MFC set to  0.000000
11/23/2011	3:30:25 PM	BCl3 MFC set to  0.000000
11/23/2011	3:30:25 PM	PHl3 MFC set to  0.000000
11/23/2011	3:30:25 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:30:25 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:30:25 PM	Tube furnace set to 0
11/23/2011	3:30:55 PM	Helium valve closed
11/23/2011	3:30:55 PM	H2 valve closed
11/23/2011	3:30:55 PM	BCl3 valve closed
11/23/2011	3:30:55 PM	PH3 valve closed
11/23/2011	3:30:55 PM	SiCl4 pre valve closed
11/23/2011	3:30:55 PM	SiCl4 post valve closed
11/23/2011	3:30:55 PM	Bypass valve closed
11/23/2011	3:30:55 PM	Bubbler valve closed
11/23/2011	3:30:55 PM	Main Vac valve opened
11/23/2011	3:30:55 PM	Helium MFC set to  0.000000
11/23/2011	3:30:55 PM	H2 MFC set to  0.000000
11/23/2011	3:30:55 PM	BCl3 MFC set to  0.000000
11/23/2011	3:30:55 PM	PHl3 MFC set to  0.000000
11/23/2011	3:30:55 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:30:55 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:30:55 PM	Tube furnace set to 0
11/23/2011	3:31:25 PM	H2 valve closed
11/23/2011	3:31:25 PM	BCl3 valve closed
11/23/2011	3:31:25 PM	PH3 valve closed
11/23/2011	3:31:25 PM	SiCl4 pre valve closed
11/23/2011	3:31:25 PM	SiCl4 post valve closed
11/23/2011	3:31:25 PM	Bypass valve closed
11/23/2011	3:31:25 PM	Bubbler valve closed
11/23/2011	3:31:25 PM	Helium valve opened
11/23/2011	3:31:25 PM	Main Vac valve opened
11/23/2011	3:31:25 PM	Helium MFC set to  20.000000
11/23/2011	3:31:25 PM	H2 MFC set to  0.000000
11/23/2011	3:31:25 PM	BCl3 MFC set to  0.000000
11/23/2011	3:31:25 PM	PHl3 MFC set to  0.000000
11/23/2011	3:31:25 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:31:25 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:31:25 PM	Tube furnace set to 0
11/23/2011	3:31:55 PM	Helium valve closed
11/23/2011	3:31:55 PM	H2 valve closed
11/23/2011	3:31:55 PM	BCl3 valve closed
11/23/2011	3:31:55 PM	PH3 valve closed
11/23/2011	3:31:55 PM	SiCl4 pre valve closed
11/23/2011	3:31:55 PM	SiCl4 post valve closed
11/23/2011	3:31:55 PM	Bypass valve closed
11/23/2011	3:31:55 PM	Bubbler valve closed
11/23/2011	3:31:55 PM	Main Vac valve opened
11/23/2011	3:31:55 PM	Helium MFC set to  0.000000
11/23/2011	3:31:55 PM	H2 MFC set to  0.000000
11/23/2011	3:31:55 PM	BCl3 MFC set to  0.000000
11/23/2011	3:31:55 PM	PHl3 MFC set to  0.000000
11/23/2011	3:31:55 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:31:55 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:31:55 PM	Tube furnace set to 0
11/23/2011	3:32:25 PM	H2 valve closed
11/23/2011	3:32:25 PM	BCl3 valve closed
11/23/2011	3:32:25 PM	PH3 valve closed
11/23/2011	3:32:25 PM	SiCl4 pre valve closed
11/23/2011	3:32:26 PM	SiCl4 post valve closed
11/23/2011	3:32:26 PM	Bypass valve closed
11/23/2011	3:32:26 PM	Bubbler valve closed
11/23/2011	3:32:26 PM	Helium valve opened
11/23/2011	3:32:26 PM	Main Vac valve opened
11/23/2011	3:32:26 PM	Helium MFC set to  20.000000
11/23/2011	3:32:26 PM	H2 MFC set to  0.000000
11/23/2011	3:32:26 PM	BCl3 MFC set to  0.000000
11/23/2011	3:32:26 PM	PHl3 MFC set to  0.000000
11/23/2011	3:32:26 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:32:26 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:32:26 PM	Tube furnace set to 0
11/23/2011	3:32:56 PM	Helium valve closed
11/23/2011	3:32:56 PM	H2 valve closed
11/23/2011	3:32:56 PM	BCl3 valve closed
11/23/2011	3:32:56 PM	PH3 valve closed
11/23/2011	3:32:56 PM	SiCl4 pre valve closed
11/23/2011	3:32:56 PM	SiCl4 post valve closed
11/23/2011	3:32:56 PM	Bypass valve closed
11/23/2011	3:32:56 PM	Bubbler valve closed
11/23/2011	3:32:56 PM	Main Vac valve opened
11/23/2011	3:32:56 PM	Helium MFC set to  0.000000
11/23/2011	3:32:56 PM	H2 MFC set to  0.000000
11/23/2011	3:32:56 PM	BCl3 MFC set to  0.000000
11/23/2011	3:32:56 PM	PHl3 MFC set to  0.000000
11/23/2011	3:32:56 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:32:56 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:32:56 PM	Tube furnace set to 0
11/23/2011	3:33:26 PM	H2 valve closed
11/23/2011	3:33:26 PM	BCl3 valve closed
11/23/2011	3:33:26 PM	PH3 valve closed
11/23/2011	3:33:26 PM	SiCl4 pre valve closed
11/23/2011	3:33:26 PM	SiCl4 post valve closed
11/23/2011	3:33:26 PM	Bypass valve closed
11/23/2011	3:33:26 PM	Bubbler valve closed
11/23/2011	3:33:26 PM	Helium valve opened
11/23/2011	3:33:26 PM	Main Vac valve opened
11/23/2011	3:33:26 PM	Helium MFC set to  20.000000
11/23/2011	3:33:26 PM	H2 MFC set to  0.000000
11/23/2011	3:33:26 PM	BCl3 MFC set to  0.000000
11/23/2011	3:33:26 PM	PHl3 MFC set to  0.000000
11/23/2011	3:33:26 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:33:26 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:33:26 PM	Tube furnace set to 0
11/23/2011	3:33:56 PM	Helium valve closed
11/23/2011	3:33:56 PM	H2 valve closed
11/23/2011	3:33:56 PM	BCl3 valve closed
11/23/2011	3:33:56 PM	PH3 valve closed
11/23/2011	3:33:56 PM	SiCl4 pre valve closed
11/23/2011	3:33:56 PM	SiCl4 post valve closed
11/23/2011	3:33:56 PM	Bypass valve closed
11/23/2011	3:33:56 PM	Bubbler valve closed
11/23/2011	3:33:56 PM	Main Vac valve opened
11/23/2011	3:33:56 PM	Helium MFC set to  0.000000
11/23/2011	3:33:56 PM	H2 MFC set to  0.000000
11/23/2011	3:33:56 PM	BCl3 MFC set to  0.000000
11/23/2011	3:33:56 PM	PHl3 MFC set to  0.000000
11/23/2011	3:33:56 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:33:56 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:33:56 PM	Tube furnace set to 0
11/23/2011	3:34:26 PM	H2 valve closed
11/23/2011	3:34:26 PM	BCl3 valve closed
11/23/2011	3:34:26 PM	PH3 valve closed
11/23/2011	3:34:26 PM	SiCl4 pre valve closed
11/23/2011	3:34:26 PM	SiCl4 post valve closed
11/23/2011	3:34:26 PM	Bypass valve closed
11/23/2011	3:34:26 PM	Bubbler valve closed
11/23/2011	3:34:26 PM	Helium valve opened
11/23/2011	3:34:26 PM	Main Vac valve opened
11/23/2011	3:34:26 PM	Helium MFC set to  20.000000
11/23/2011	3:34:26 PM	H2 MFC set to  0.000000
11/23/2011	3:34:26 PM	BCl3 MFC set to  0.000000
11/23/2011	3:34:26 PM	PHl3 MFC set to  0.000000
11/23/2011	3:34:26 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:34:26 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:34:27 PM	Tube furnace set to 0
11/23/2011	3:34:57 PM	Helium valve closed
11/23/2011	3:34:57 PM	H2 valve closed
11/23/2011	3:34:57 PM	BCl3 valve closed
11/23/2011	3:34:57 PM	PH3 valve closed
11/23/2011	3:34:57 PM	SiCl4 pre valve closed
11/23/2011	3:34:57 PM	SiCl4 post valve closed
11/23/2011	3:34:57 PM	Bypass valve closed
11/23/2011	3:34:57 PM	Bubbler valve closed
11/23/2011	3:34:57 PM	Main Vac valve opened
11/23/2011	3:34:57 PM	Helium MFC set to  0.000000
11/23/2011	3:34:57 PM	H2 MFC set to  0.000000
11/23/2011	3:34:57 PM	BCl3 MFC set to  0.000000
11/23/2011	3:34:57 PM	PHl3 MFC set to  0.000000
11/23/2011	3:34:57 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:34:57 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:34:57 PM	Tube furnace set to 0
11/23/2011	3:35:27 PM	H2 valve closed
11/23/2011	3:35:27 PM	BCl3 valve closed
11/23/2011	3:35:27 PM	PH3 valve closed
11/23/2011	3:35:27 PM	SiCl4 pre valve closed
11/23/2011	3:35:27 PM	SiCl4 post valve closed
11/23/2011	3:35:27 PM	Bypass valve closed
11/23/2011	3:35:27 PM	Bubbler valve closed
11/23/2011	3:35:27 PM	Helium valve opened
11/23/2011	3:35:27 PM	Main Vac valve opened
11/23/2011	3:35:27 PM	Helium MFC set to  20.000000
11/23/2011	3:35:27 PM	H2 MFC set to  0.000000
11/23/2011	3:35:27 PM	BCl3 MFC set to  0.000000
11/23/2011	3:35:27 PM	PHl3 MFC set to  0.000000
11/23/2011	3:35:27 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:35:27 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:35:27 PM	Tube furnace set to 0
11/23/2011	3:35:57 PM	Helium valve closed
11/23/2011	3:35:57 PM	H2 valve closed
11/23/2011	3:35:57 PM	BCl3 valve closed
11/23/2011	3:35:57 PM	PH3 valve closed
11/23/2011	3:35:57 PM	SiCl4 pre valve closed
11/23/2011	3:35:57 PM	SiCl4 post valve closed
11/23/2011	3:35:57 PM	Bypass valve closed
11/23/2011	3:35:57 PM	Bubbler valve closed
11/23/2011	3:35:57 PM	Main Vac valve opened
11/23/2011	3:35:57 PM	Helium MFC set to  0.000000
11/23/2011	3:35:57 PM	H2 MFC set to  0.000000
11/23/2011	3:35:57 PM	BCl3 MFC set to  0.000000
11/23/2011	3:35:57 PM	PHl3 MFC set to  0.000000
11/23/2011	3:35:57 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:35:57 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:35:57 PM	Tube furnace set to 0
11/23/2011	3:36:27 PM	H2 valve closed
11/23/2011	3:36:27 PM	BCl3 valve closed
11/23/2011	3:36:27 PM	PH3 valve closed
11/23/2011	3:36:27 PM	SiCl4 pre valve closed
11/23/2011	3:36:27 PM	SiCl4 post valve closed
11/23/2011	3:36:27 PM	Bypass valve closed
11/23/2011	3:36:27 PM	Bubbler valve closed
11/23/2011	3:36:27 PM	Helium valve opened
11/23/2011	3:36:27 PM	Main Vac valve opened
11/23/2011	3:36:27 PM	Helium MFC set to  20.000000
11/23/2011	3:36:27 PM	H2 MFC set to  0.000000
11/23/2011	3:36:27 PM	BCl3 MFC set to  0.000000
11/23/2011	3:36:27 PM	PHl3 MFC set to  0.000000
11/23/2011	3:36:27 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:36:27 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:36:27 PM	Tube furnace set to 0
11/23/2011	3:36:57 PM	Helium valve closed
11/23/2011	3:36:57 PM	H2 valve closed
11/23/2011	3:36:57 PM	BCl3 valve closed
11/23/2011	3:36:57 PM	PH3 valve closed
11/23/2011	3:36:57 PM	SiCl4 pre valve closed
11/23/2011	3:36:57 PM	SiCl4 post valve closed
11/23/2011	3:36:57 PM	Bypass valve closed
11/23/2011	3:36:57 PM	Bubbler valve closed
11/23/2011	3:36:57 PM	Main Vac valve opened
11/23/2011	3:36:57 PM	Helium MFC set to  0.000000
11/23/2011	3:36:57 PM	H2 MFC set to  0.000000
11/23/2011	3:36:57 PM	BCl3 MFC set to  0.000000
11/23/2011	3:36:57 PM	PHl3 MFC set to  0.000000
11/23/2011	3:36:57 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:36:57 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:36:58 PM	Tube furnace set to 0
11/23/2011	3:36:59 PM	Run finished at 3:36 PM
11/23/2011	3:36:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/23/2011	3:42:48 PM	Main Vac valve closed
11/23/2011	3:43:11 PM	Main Vac valve opened
11/23/2011	3:43:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/23/2011	3:43:26 PM	Recipe started at 3:43 PM
11/23/2011	3:43:26 PM	Helium valve closed
11/23/2011	3:43:26 PM	H2 valve closed
11/23/2011	3:43:26 PM	BCl3 valve closed
11/23/2011	3:43:26 PM	PH3 valve closed
11/23/2011	3:43:26 PM	SiCl4 pre valve closed
11/23/2011	3:43:26 PM	SiCl4 post valve closed
11/23/2011	3:43:26 PM	Main Vac valve closed
11/23/2011	3:43:26 PM	Bubbler valve closed
11/23/2011	3:43:26 PM	Bypass valve opened
11/23/2011	3:43:26 PM	Helium MFC set to  0.000000
11/23/2011	3:43:26 PM	H2 MFC set to  0.000000
11/23/2011	3:43:26 PM	BCl3 MFC set to  0.000000
11/23/2011	3:43:26 PM	PHl3 MFC set to  0.000000
11/23/2011	3:43:26 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:43:26 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:43:26 PM	Tube furnace set to 0
11/23/2011	3:43:26 PM	Helium valve closed
11/23/2011	3:43:26 PM	H2 valve closed
11/23/2011	3:43:26 PM	BCl3 valve closed
11/23/2011	3:43:26 PM	PH3 valve closed
11/23/2011	3:43:26 PM	SiCl4 pre valve closed
11/23/2011	3:43:26 PM	SiCl4 post valve closed
11/23/2011	3:43:26 PM	Main Vac valve closed
11/23/2011	3:43:26 PM	Bubbler valve closed
11/23/2011	3:43:26 PM	Bypass valve opened
11/23/2011	3:43:26 PM	Helium MFC set to  0.000000
11/23/2011	3:43:26 PM	H2 MFC set to  0.000000
11/23/2011	3:43:26 PM	BCl3 MFC set to  0.000000
11/23/2011	3:43:26 PM	PHl3 MFC set to  0.000000
11/23/2011	3:43:26 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:43:26 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:43:27 PM	Tube furnace set to 0
11/23/2011	3:43:28 PM	Helium valve closed
11/23/2011	3:43:28 PM	H2 valve closed
11/23/2011	3:43:28 PM	BCl3 valve closed
11/23/2011	3:43:28 PM	PH3 valve closed
11/23/2011	3:43:28 PM	SiCl4 pre valve closed
11/23/2011	3:43:28 PM	SiCl4 post valve closed
11/23/2011	3:43:28 PM	Bypass valve closed
11/23/2011	3:43:28 PM	Bubbler valve closed
11/23/2011	3:43:28 PM	Main Vac valve opened
11/23/2011	3:43:28 PM	Helium MFC set to  0.000000
11/23/2011	3:43:28 PM	H2 MFC set to  0.000000
11/23/2011	3:43:28 PM	BCl3 MFC set to  0.000000
11/23/2011	3:43:28 PM	PHl3 MFC set to  0.000000
11/23/2011	3:43:28 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:43:28 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:43:29 PM	Tube furnace set to 0
11/23/2011	3:43:33 PM	H2 valve closed
11/23/2011	3:43:33 PM	BCl3 valve closed
11/23/2011	3:43:33 PM	PH3 valve closed
11/23/2011	3:43:33 PM	SiCl4 pre valve closed
11/23/2011	3:43:33 PM	SiCl4 post valve closed
11/23/2011	3:43:33 PM	Bypass valve closed
11/23/2011	3:43:33 PM	Bubbler valve closed
11/23/2011	3:43:33 PM	Helium valve opened
11/23/2011	3:43:33 PM	Main Vac valve opened
11/23/2011	3:43:33 PM	Helium MFC set to  20.000000
11/23/2011	3:43:33 PM	H2 MFC set to  0.000000
11/23/2011	3:43:33 PM	BCl3 MFC set to  0.000000
11/23/2011	3:43:33 PM	PHl3 MFC set to  0.000000
11/23/2011	3:43:33 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:43:33 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:43:34 PM	Tube furnace set to 0
11/23/2011	3:44:04 PM	Helium valve closed
11/23/2011	3:44:04 PM	H2 valve closed
11/23/2011	3:44:04 PM	BCl3 valve closed
11/23/2011	3:44:04 PM	PH3 valve closed
11/23/2011	3:44:04 PM	SiCl4 pre valve closed
11/23/2011	3:44:04 PM	SiCl4 post valve closed
11/23/2011	3:44:04 PM	Bypass valve closed
11/23/2011	3:44:04 PM	Bubbler valve closed
11/23/2011	3:44:04 PM	Main Vac valve opened
11/23/2011	3:44:04 PM	Helium MFC set to  0.000000
11/23/2011	3:44:04 PM	H2 MFC set to  0.000000
11/23/2011	3:44:04 PM	BCl3 MFC set to  0.000000
11/23/2011	3:44:04 PM	PHl3 MFC set to  0.000000
11/23/2011	3:44:04 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:44:04 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:44:04 PM	Tube furnace set to 0
11/23/2011	3:44:34 PM	H2 valve closed
11/23/2011	3:44:34 PM	BCl3 valve closed
11/23/2011	3:44:34 PM	PH3 valve closed
11/23/2011	3:44:34 PM	SiCl4 pre valve closed
11/23/2011	3:44:34 PM	SiCl4 post valve closed
11/23/2011	3:44:34 PM	Bypass valve closed
11/23/2011	3:44:34 PM	Bubbler valve closed
11/23/2011	3:44:34 PM	Helium valve opened
11/23/2011	3:44:34 PM	Main Vac valve opened
11/23/2011	3:44:34 PM	Helium MFC set to  20.000000
11/23/2011	3:44:34 PM	H2 MFC set to  0.000000
11/23/2011	3:44:34 PM	BCl3 MFC set to  0.000000
11/23/2011	3:44:34 PM	PHl3 MFC set to  0.000000
11/23/2011	3:44:34 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:44:34 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:44:34 PM	Tube furnace set to 0
11/23/2011	3:45:04 PM	Helium valve closed
11/23/2011	3:45:04 PM	H2 valve closed
11/23/2011	3:45:04 PM	BCl3 valve closed
11/23/2011	3:45:04 PM	PH3 valve closed
11/23/2011	3:45:04 PM	SiCl4 pre valve closed
11/23/2011	3:45:04 PM	SiCl4 post valve closed
11/23/2011	3:45:04 PM	Bypass valve closed
11/23/2011	3:45:04 PM	Bubbler valve closed
11/23/2011	3:45:04 PM	Main Vac valve opened
11/23/2011	3:45:04 PM	Helium MFC set to  0.000000
11/23/2011	3:45:04 PM	H2 MFC set to  0.000000
11/23/2011	3:45:04 PM	BCl3 MFC set to  0.000000
11/23/2011	3:45:04 PM	PHl3 MFC set to  0.000000
11/23/2011	3:45:04 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:45:04 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:45:04 PM	Tube furnace set to 0
11/23/2011	3:45:34 PM	H2 valve closed
11/23/2011	3:45:34 PM	BCl3 valve closed
11/23/2011	3:45:34 PM	PH3 valve closed
11/23/2011	3:45:34 PM	SiCl4 pre valve closed
11/23/2011	3:45:34 PM	SiCl4 post valve closed
11/23/2011	3:45:34 PM	Bypass valve closed
11/23/2011	3:45:34 PM	Bubbler valve closed
11/23/2011	3:45:34 PM	Helium valve opened
11/23/2011	3:45:34 PM	Main Vac valve opened
11/23/2011	3:45:34 PM	Helium MFC set to  20.000000
11/23/2011	3:45:34 PM	H2 MFC set to  0.000000
11/23/2011	3:45:34 PM	BCl3 MFC set to  0.000000
11/23/2011	3:45:34 PM	PHl3 MFC set to  0.000000
11/23/2011	3:45:34 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:45:34 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:45:34 PM	Tube furnace set to 0
11/23/2011	3:46:04 PM	Helium valve closed
11/23/2011	3:46:04 PM	H2 valve closed
11/23/2011	3:46:04 PM	BCl3 valve closed
11/23/2011	3:46:04 PM	PH3 valve closed
11/23/2011	3:46:04 PM	SiCl4 pre valve closed
11/23/2011	3:46:04 PM	SiCl4 post valve closed
11/23/2011	3:46:04 PM	Bypass valve closed
11/23/2011	3:46:04 PM	Bubbler valve closed
11/23/2011	3:46:04 PM	Main Vac valve opened
11/23/2011	3:46:04 PM	Helium MFC set to  0.000000
11/23/2011	3:46:04 PM	H2 MFC set to  0.000000
11/23/2011	3:46:04 PM	BCl3 MFC set to  0.000000
11/23/2011	3:46:04 PM	PHl3 MFC set to  0.000000
11/23/2011	3:46:04 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:46:04 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:46:04 PM	Tube furnace set to 0
11/23/2011	3:46:35 PM	H2 valve closed
11/23/2011	3:46:35 PM	BCl3 valve closed
11/23/2011	3:46:35 PM	PH3 valve closed
11/23/2011	3:46:35 PM	SiCl4 pre valve closed
11/23/2011	3:46:35 PM	SiCl4 post valve closed
11/23/2011	3:46:35 PM	Bypass valve closed
11/23/2011	3:46:35 PM	Bubbler valve closed
11/23/2011	3:46:35 PM	Helium valve opened
11/23/2011	3:46:35 PM	Main Vac valve opened
11/23/2011	3:46:35 PM	Helium MFC set to  20.000000
11/23/2011	3:46:35 PM	H2 MFC set to  0.000000
11/23/2011	3:46:35 PM	BCl3 MFC set to  0.000000
11/23/2011	3:46:35 PM	PHl3 MFC set to  0.000000
11/23/2011	3:46:35 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:46:35 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:46:35 PM	Tube furnace set to 0
11/23/2011	3:47:05 PM	Helium valve closed
11/23/2011	3:47:05 PM	H2 valve closed
11/23/2011	3:47:05 PM	BCl3 valve closed
11/23/2011	3:47:05 PM	PH3 valve closed
11/23/2011	3:47:05 PM	SiCl4 pre valve closed
11/23/2011	3:47:05 PM	SiCl4 post valve closed
11/23/2011	3:47:05 PM	Bypass valve closed
11/23/2011	3:47:05 PM	Bubbler valve closed
11/23/2011	3:47:05 PM	Main Vac valve opened
11/23/2011	3:47:05 PM	Helium MFC set to  0.000000
11/23/2011	3:47:05 PM	H2 MFC set to  0.000000
11/23/2011	3:47:05 PM	BCl3 MFC set to  0.000000
11/23/2011	3:47:05 PM	PHl3 MFC set to  0.000000
11/23/2011	3:47:05 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:47:05 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:47:05 PM	Tube furnace set to 0
11/23/2011	3:47:35 PM	H2 valve closed
11/23/2011	3:47:35 PM	BCl3 valve closed
11/23/2011	3:47:35 PM	PH3 valve closed
11/23/2011	3:47:35 PM	SiCl4 pre valve closed
11/23/2011	3:47:35 PM	SiCl4 post valve closed
11/23/2011	3:47:35 PM	Bypass valve closed
11/23/2011	3:47:35 PM	Bubbler valve closed
11/23/2011	3:47:35 PM	Helium valve opened
11/23/2011	3:47:35 PM	Main Vac valve opened
11/23/2011	3:47:35 PM	Helium MFC set to  20.000000
11/23/2011	3:47:35 PM	H2 MFC set to  0.000000
11/23/2011	3:47:35 PM	BCl3 MFC set to  0.000000
11/23/2011	3:47:35 PM	PHl3 MFC set to  0.000000
11/23/2011	3:47:35 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:47:35 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:47:35 PM	Tube furnace set to 0
11/23/2011	3:48:05 PM	Helium valve closed
11/23/2011	3:48:05 PM	H2 valve closed
11/23/2011	3:48:05 PM	BCl3 valve closed
11/23/2011	3:48:05 PM	PH3 valve closed
11/23/2011	3:48:05 PM	SiCl4 pre valve closed
11/23/2011	3:48:05 PM	SiCl4 post valve closed
11/23/2011	3:48:05 PM	Bypass valve closed
11/23/2011	3:48:05 PM	Bubbler valve closed
11/23/2011	3:48:05 PM	Main Vac valve opened
11/23/2011	3:48:05 PM	Helium MFC set to  0.000000
11/23/2011	3:48:05 PM	H2 MFC set to  0.000000
11/23/2011	3:48:05 PM	BCl3 MFC set to  0.000000
11/23/2011	3:48:05 PM	PHl3 MFC set to  0.000000
11/23/2011	3:48:05 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:48:05 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:48:05 PM	Tube furnace set to 0
11/23/2011	3:48:35 PM	H2 valve closed
11/23/2011	3:48:35 PM	BCl3 valve closed
11/23/2011	3:48:35 PM	PH3 valve closed
11/23/2011	3:48:35 PM	SiCl4 pre valve closed
11/23/2011	3:48:35 PM	SiCl4 post valve closed
11/23/2011	3:48:35 PM	Bypass valve closed
11/23/2011	3:48:35 PM	Bubbler valve closed
11/23/2011	3:48:35 PM	Helium valve opened
11/23/2011	3:48:35 PM	Main Vac valve opened
11/23/2011	3:48:35 PM	Helium MFC set to  20.000000
11/23/2011	3:48:35 PM	H2 MFC set to  0.000000
11/23/2011	3:48:35 PM	BCl3 MFC set to  0.000000
11/23/2011	3:48:35 PM	PHl3 MFC set to  0.000000
11/23/2011	3:48:35 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:48:35 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:48:36 PM	Tube furnace set to 0
11/23/2011	3:49:06 PM	Helium valve closed
11/23/2011	3:49:06 PM	H2 valve closed
11/23/2011	3:49:06 PM	BCl3 valve closed
11/23/2011	3:49:06 PM	PH3 valve closed
11/23/2011	3:49:06 PM	SiCl4 pre valve closed
11/23/2011	3:49:06 PM	SiCl4 post valve closed
11/23/2011	3:49:06 PM	Bypass valve closed
11/23/2011	3:49:06 PM	Bubbler valve closed
11/23/2011	3:49:06 PM	Main Vac valve opened
11/23/2011	3:49:06 PM	Helium MFC set to  0.000000
11/23/2011	3:49:06 PM	H2 MFC set to  0.000000
11/23/2011	3:49:06 PM	BCl3 MFC set to  0.000000
11/23/2011	3:49:06 PM	PHl3 MFC set to  0.000000
11/23/2011	3:49:06 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:49:06 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:49:06 PM	Tube furnace set to 0
11/23/2011	3:49:36 PM	H2 valve closed
11/23/2011	3:49:36 PM	BCl3 valve closed
11/23/2011	3:49:36 PM	PH3 valve closed
11/23/2011	3:49:36 PM	SiCl4 pre valve closed
11/23/2011	3:49:36 PM	SiCl4 post valve closed
11/23/2011	3:49:36 PM	Bypass valve closed
11/23/2011	3:49:36 PM	Bubbler valve closed
11/23/2011	3:49:36 PM	Helium valve opened
11/23/2011	3:49:36 PM	Main Vac valve opened
11/23/2011	3:49:36 PM	Helium MFC set to  20.000000
11/23/2011	3:49:36 PM	H2 MFC set to  0.000000
11/23/2011	3:49:36 PM	BCl3 MFC set to  0.000000
11/23/2011	3:49:36 PM	PHl3 MFC set to  0.000000
11/23/2011	3:49:36 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:49:36 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:49:36 PM	Tube furnace set to 0
11/23/2011	3:50:06 PM	Helium valve closed
11/23/2011	3:50:06 PM	H2 valve closed
11/23/2011	3:50:06 PM	BCl3 valve closed
11/23/2011	3:50:06 PM	PH3 valve closed
11/23/2011	3:50:06 PM	SiCl4 pre valve closed
11/23/2011	3:50:06 PM	SiCl4 post valve closed
11/23/2011	3:50:06 PM	Bypass valve closed
11/23/2011	3:50:06 PM	Bubbler valve closed
11/23/2011	3:50:06 PM	Main Vac valve opened
11/23/2011	3:50:06 PM	Helium MFC set to  0.000000
11/23/2011	3:50:06 PM	H2 MFC set to  0.000000
11/23/2011	3:50:06 PM	BCl3 MFC set to  0.000000
11/23/2011	3:50:06 PM	PHl3 MFC set to  0.000000
11/23/2011	3:50:06 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:50:06 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:50:06 PM	Tube furnace set to 0
11/23/2011	3:50:36 PM	H2 valve closed
11/23/2011	3:50:36 PM	BCl3 valve closed
11/23/2011	3:50:36 PM	PH3 valve closed
11/23/2011	3:50:36 PM	SiCl4 pre valve closed
11/23/2011	3:50:36 PM	SiCl4 post valve closed
11/23/2011	3:50:36 PM	Bypass valve closed
11/23/2011	3:50:36 PM	Bubbler valve closed
11/23/2011	3:50:36 PM	Helium valve opened
11/23/2011	3:50:36 PM	Main Vac valve opened
11/23/2011	3:50:36 PM	Helium MFC set to  20.000000
11/23/2011	3:50:36 PM	H2 MFC set to  0.000000
11/23/2011	3:50:36 PM	BCl3 MFC set to  0.000000
11/23/2011	3:50:36 PM	PHl3 MFC set to  0.000000
11/23/2011	3:50:36 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:50:36 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:50:36 PM	Tube furnace set to 0
11/23/2011	3:51:06 PM	Helium valve closed
11/23/2011	3:51:06 PM	H2 valve closed
11/23/2011	3:51:06 PM	BCl3 valve closed
11/23/2011	3:51:06 PM	PH3 valve closed
11/23/2011	3:51:06 PM	SiCl4 pre valve closed
11/23/2011	3:51:06 PM	SiCl4 post valve closed
11/23/2011	3:51:06 PM	Bypass valve closed
11/23/2011	3:51:06 PM	Bubbler valve closed
11/23/2011	3:51:06 PM	Main Vac valve opened
11/23/2011	3:51:06 PM	Helium MFC set to  0.000000
11/23/2011	3:51:06 PM	H2 MFC set to  0.000000
11/23/2011	3:51:06 PM	BCl3 MFC set to  0.000000
11/23/2011	3:51:06 PM	PHl3 MFC set to  0.000000
11/23/2011	3:51:06 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:51:06 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:51:07 PM	Tube furnace set to 0
11/23/2011	3:51:37 PM	H2 valve closed
11/23/2011	3:51:37 PM	BCl3 valve closed
11/23/2011	3:51:37 PM	PH3 valve closed
11/23/2011	3:51:37 PM	SiCl4 pre valve closed
11/23/2011	3:51:37 PM	SiCl4 post valve closed
11/23/2011	3:51:37 PM	Bypass valve closed
11/23/2011	3:51:37 PM	Bubbler valve closed
11/23/2011	3:51:37 PM	Helium valve opened
11/23/2011	3:51:37 PM	Main Vac valve opened
11/23/2011	3:51:37 PM	Helium MFC set to  20.000000
11/23/2011	3:51:37 PM	H2 MFC set to  0.000000
11/23/2011	3:51:37 PM	BCl3 MFC set to  0.000000
11/23/2011	3:51:37 PM	PHl3 MFC set to  0.000000
11/23/2011	3:51:37 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:51:37 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:51:37 PM	Tube furnace set to 0
11/23/2011	3:52:07 PM	Helium valve closed
11/23/2011	3:52:07 PM	H2 valve closed
11/23/2011	3:52:07 PM	BCl3 valve closed
11/23/2011	3:52:07 PM	PH3 valve closed
11/23/2011	3:52:07 PM	SiCl4 pre valve closed
11/23/2011	3:52:07 PM	SiCl4 post valve closed
11/23/2011	3:52:07 PM	Bypass valve closed
11/23/2011	3:52:07 PM	Bubbler valve closed
11/23/2011	3:52:07 PM	Main Vac valve opened
11/23/2011	3:52:07 PM	Helium MFC set to  0.000000
11/23/2011	3:52:07 PM	H2 MFC set to  0.000000
11/23/2011	3:52:07 PM	BCl3 MFC set to  0.000000
11/23/2011	3:52:07 PM	PHl3 MFC set to  0.000000
11/23/2011	3:52:07 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:52:07 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:52:07 PM	Tube furnace set to 0
11/23/2011	3:52:37 PM	H2 valve closed
11/23/2011	3:52:37 PM	BCl3 valve closed
11/23/2011	3:52:37 PM	PH3 valve closed
11/23/2011	3:52:37 PM	SiCl4 pre valve closed
11/23/2011	3:52:37 PM	SiCl4 post valve closed
11/23/2011	3:52:37 PM	Bypass valve closed
11/23/2011	3:52:37 PM	Bubbler valve closed
11/23/2011	3:52:37 PM	Helium valve opened
11/23/2011	3:52:37 PM	Main Vac valve opened
11/23/2011	3:52:37 PM	Helium MFC set to  20.000000
11/23/2011	3:52:37 PM	H2 MFC set to  0.000000
11/23/2011	3:52:37 PM	BCl3 MFC set to  0.000000
11/23/2011	3:52:37 PM	PHl3 MFC set to  0.000000
11/23/2011	3:52:37 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:52:37 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:52:37 PM	Tube furnace set to 0
11/23/2011	3:53:07 PM	Helium valve closed
11/23/2011	3:53:07 PM	H2 valve closed
11/23/2011	3:53:07 PM	BCl3 valve closed
11/23/2011	3:53:07 PM	PH3 valve closed
11/23/2011	3:53:07 PM	SiCl4 pre valve closed
11/23/2011	3:53:07 PM	SiCl4 post valve closed
11/23/2011	3:53:07 PM	Bypass valve closed
11/23/2011	3:53:07 PM	Bubbler valve closed
11/23/2011	3:53:07 PM	Main Vac valve opened
11/23/2011	3:53:07 PM	Helium MFC set to  0.000000
11/23/2011	3:53:07 PM	H2 MFC set to  0.000000
11/23/2011	3:53:07 PM	BCl3 MFC set to  0.000000
11/23/2011	3:53:07 PM	PHl3 MFC set to  0.000000
11/23/2011	3:53:07 PM	SiCl4 MFC set to  0.000000
11/23/2011	3:53:07 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	3:53:07 PM	Tube furnace set to 0
11/23/2011	3:53:08 PM	Run finished at 3:53 PM
11/23/2011	3:53:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/23/2011	3:59:11 PM	Main Vac valve closed
11/23/2011	3:59:37 PM	Main Vac valve opened
11/23/2011	4:19:05 PM	Main Vac valve closed
11/23/2011	4:19:24 PM	Main Vac valve opened
11/23/2011	4:26:26 PM	Recipe started at 4:26 PM
11/23/2011	4:26:26 PM	Helium valve closed
11/23/2011	4:26:26 PM	H2 valve closed
11/23/2011	4:26:26 PM	BCl3 valve closed
11/23/2011	4:26:26 PM	PH3 valve closed
11/23/2011	4:26:26 PM	SiCl4 pre valve closed
11/23/2011	4:26:26 PM	SiCl4 post valve closed
11/23/2011	4:26:26 PM	Main Vac valve closed
11/23/2011	4:26:26 PM	Bypass valve closed
11/23/2011	4:26:26 PM	Bubbler valve closed
11/23/2011	4:26:26 PM	Helium MFC set to  0.000000
11/23/2011	4:26:26 PM	H2 MFC set to  0.000000
11/23/2011	4:26:26 PM	BCl3 MFC set to  0.000000
11/23/2011	4:26:26 PM	PHl3 MFC set to  0.000000
11/23/2011	4:26:26 PM	SiCl4 MFC set to  0.000000
11/23/2011	4:26:26 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	4:26:26 PM	Tube furnace set to 0
11/23/2011	4:26:29 PM	Helium valve closed
11/23/2011	4:26:29 PM	BCl3 valve closed
11/23/2011	4:26:29 PM	PH3 valve closed
11/23/2011	4:26:29 PM	SiCl4 pre valve closed
11/23/2011	4:26:29 PM	SiCl4 post valve closed
11/23/2011	4:26:29 PM	Main Vac valve closed
11/23/2011	4:26:29 PM	Bypass valve closed
11/23/2011	4:26:29 PM	Bubbler valve closed
11/23/2011	4:26:29 PM	H2 valve opened
11/23/2011	4:26:29 PM	Helium MFC set to  0.000000
11/23/2011	4:26:29 PM	H2 MFC set to  500.000000
11/23/2011	4:26:29 PM	BCl3 MFC set to  0.000000
11/23/2011	4:26:29 PM	PHl3 MFC set to  0.000000
11/23/2011	4:26:29 PM	SiCl4 MFC set to  0.000000
11/23/2011	4:26:29 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	4:26:29 PM	Tube furnace set to 0
11/23/2011	4:27:36 PM	Helium valve closed
11/23/2011	4:27:36 PM	BCl3 valve closed
11/23/2011	4:27:36 PM	PH3 valve closed
11/23/2011	4:27:36 PM	SiCl4 pre valve closed
11/23/2011	4:27:36 PM	SiCl4 post valve closed
11/23/2011	4:27:36 PM	Main Vac valve closed
11/23/2011	4:27:36 PM	Bypass valve closed
11/23/2011	4:27:36 PM	H2 valve opened
11/23/2011	4:27:36 PM	Bubbler valve opened
11/23/2011	4:27:36 PM	Helium MFC set to  0.000000
11/23/2011	4:27:36 PM	H2 MFC set to  500.000000
11/23/2011	4:27:36 PM	BCl3 MFC set to  0.000000
11/23/2011	4:27:36 PM	PHl3 MFC set to  0.000000
11/23/2011	4:27:36 PM	SiCl4 MFC set to  0.000000
11/23/2011	4:27:36 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	4:27:36 PM	Tube furnace set to 0
11/23/2011	4:27:38 PM	Helium valve closed
11/23/2011	4:27:38 PM	BCl3 valve closed
11/23/2011	4:27:38 PM	PH3 valve closed
11/23/2011	4:27:38 PM	SiCl4 pre valve closed
11/23/2011	4:27:38 PM	SiCl4 post valve closed
11/23/2011	4:27:38 PM	Main Vac valve closed
11/23/2011	4:27:38 PM	Bypass valve closed
11/23/2011	4:27:38 PM	H2 valve opened
11/23/2011	4:27:38 PM	Bubbler valve opened
11/23/2011	4:27:38 PM	Helium MFC set to  0.000000
11/23/2011	4:27:38 PM	H2 MFC set to  500.000000
11/23/2011	4:27:38 PM	BCl3 MFC set to  0.000000
11/23/2011	4:27:38 PM	PHl3 MFC set to  0.000000
11/23/2011	4:27:38 PM	SiCl4 MFC set to  0.000000
11/23/2011	4:27:38 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	4:27:38 PM	Tube furnace set to 1000
11/23/2011	4:50:38 PM	Helium valve closed
11/23/2011	4:50:38 PM	PH3 valve closed
11/23/2011	4:50:38 PM	Main Vac valve closed
11/23/2011	4:50:38 PM	Bypass valve closed
11/23/2011	4:50:38 PM	H2 valve opened
11/23/2011	4:50:38 PM	BCl3 valve opened
11/23/2011	4:50:38 PM	SiCl4 pre valve opened
11/23/2011	4:50:38 PM	SiCl4 post valve opened
11/23/2011	4:50:38 PM	Bubbler valve opened
11/23/2011	4:50:38 PM	Helium MFC set to  0.000000
11/23/2011	4:50:38 PM	H2 MFC set to  495.000000
11/23/2011	4:50:38 PM	BCl3 MFC set to  0.500000
11/23/2011	4:50:38 PM	PHl3 MFC set to  0.000000
11/23/2011	4:50:38 PM	SiCl4 MFC set to  25.000000
11/23/2011	4:50:38 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	4:50:38 PM	Tube furnace set to 1000
11/23/2011	5:10:38 PM	Helium valve closed
11/23/2011	5:10:38 PM	BCl3 valve closed
11/23/2011	5:10:38 PM	PH3 valve closed
11/23/2011	5:10:38 PM	SiCl4 pre valve closed
11/23/2011	5:10:38 PM	SiCl4 post valve closed
11/23/2011	5:10:38 PM	Main Vac valve closed
11/23/2011	5:10:38 PM	Bypass valve closed
11/23/2011	5:10:38 PM	H2 valve opened
11/23/2011	5:10:38 PM	Bubbler valve opened
11/23/2011	5:10:38 PM	Helium MFC set to  0.000000
11/23/2011	5:10:38 PM	H2 MFC set to  500.000000
11/23/2011	5:10:38 PM	BCl3 MFC set to  0.000000
11/23/2011	5:10:38 PM	PHl3 MFC set to  0.000000
11/23/2011	5:10:38 PM	SiCl4 MFC set to  0.000000
11/23/2011	5:10:38 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	5:10:38 PM	Tube furnace set to 750
11/23/2011	5:15:38 PM	H2 valve closed
11/23/2011	5:15:38 PM	BCl3 valve closed
11/23/2011	5:15:38 PM	PH3 valve closed
11/23/2011	5:15:38 PM	SiCl4 pre valve closed
11/23/2011	5:15:38 PM	SiCl4 post valve closed
11/23/2011	5:15:38 PM	Main Vac valve closed
11/23/2011	5:15:38 PM	Bypass valve closed
11/23/2011	5:15:38 PM	Helium valve opened
11/23/2011	5:15:38 PM	Bubbler valve opened
11/23/2011	5:15:38 PM	Helium MFC set to  500.000000
11/23/2011	5:15:38 PM	H2 MFC set to  0.000000
11/23/2011	5:15:38 PM	BCl3 MFC set to  0.000000
11/23/2011	5:15:38 PM	PHl3 MFC set to  0.000000
11/23/2011	5:15:38 PM	SiCl4 MFC set to  0.000000
11/23/2011	5:15:38 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	5:15:38 PM	Tube furnace set to 0
11/23/2011	5:35:38 PM	Helium valve closed
11/23/2011	5:35:38 PM	H2 valve closed
11/23/2011	5:35:38 PM	BCl3 valve closed
11/23/2011	5:35:38 PM	PH3 valve closed
11/23/2011	5:35:38 PM	SiCl4 pre valve closed
11/23/2011	5:35:38 PM	SiCl4 post valve closed
11/23/2011	5:35:38 PM	Main Vac valve closed
11/23/2011	5:35:38 PM	Bypass valve closed
11/23/2011	5:35:38 PM	Bubbler valve closed
11/23/2011	5:35:38 PM	Helium MFC set to  0.000000
11/23/2011	5:35:38 PM	H2 MFC set to  0.000000
11/23/2011	5:35:38 PM	BCl3 MFC set to  0.000000
11/23/2011	5:35:38 PM	PHl3 MFC set to  0.000000
11/23/2011	5:35:38 PM	SiCl4 MFC set to  0.000000
11/23/2011	5:35:38 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	5:35:38 PM	Tube furnace set to 0
11/23/2011	5:35:39 PM	Run finished at 5:35 PM
11/23/2011	6:01:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/23/2011	6:01:25 PM	Recipe started at 6:01 PM
11/23/2011	6:01:25 PM	Helium valve closed
11/23/2011	6:01:25 PM	H2 valve closed
11/23/2011	6:01:25 PM	BCl3 valve closed
11/23/2011	6:01:25 PM	PH3 valve closed
11/23/2011	6:01:25 PM	SiCl4 pre valve closed
11/23/2011	6:01:25 PM	SiCl4 post valve closed
11/23/2011	6:01:25 PM	Main Vac valve closed
11/23/2011	6:01:25 PM	Bubbler valve closed
11/23/2011	6:01:25 PM	Bypass valve opened
11/23/2011	6:01:25 PM	Helium MFC set to  0.000000
11/23/2011	6:01:25 PM	H2 MFC set to  0.000000
11/23/2011	6:01:25 PM	BCl3 MFC set to  0.000000
11/23/2011	6:01:25 PM	PHl3 MFC set to  0.000000
11/23/2011	6:01:25 PM	SiCl4 MFC set to  0.000000
11/23/2011	6:01:25 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	6:01:25 PM	Tube furnace set to 0
11/23/2011	6:02:32 PM	Helium valve closed
11/23/2011	6:02:32 PM	H2 valve closed
11/23/2011	6:02:32 PM	BCl3 valve closed
11/23/2011	6:02:32 PM	PH3 valve closed
11/23/2011	6:02:32 PM	SiCl4 pre valve closed
11/23/2011	6:02:32 PM	SiCl4 post valve closed
11/23/2011	6:02:32 PM	Main Vac valve closed
11/23/2011	6:02:32 PM	Bubbler valve closed
11/23/2011	6:02:32 PM	Bypass valve opened
11/23/2011	6:02:32 PM	Helium MFC set to  0.000000
11/23/2011	6:02:32 PM	H2 MFC set to  0.000000
11/23/2011	6:02:32 PM	BCl3 MFC set to  0.000000
11/23/2011	6:02:32 PM	PHl3 MFC set to  0.000000
11/23/2011	6:02:32 PM	SiCl4 MFC set to  0.000000
11/23/2011	6:02:32 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	6:02:32 PM	Tube furnace set to 0
11/23/2011	6:03:32 PM	Helium valve closed
11/23/2011	6:03:32 PM	H2 valve closed
11/23/2011	6:03:32 PM	BCl3 valve closed
11/23/2011	6:03:32 PM	PH3 valve closed
11/23/2011	6:03:32 PM	SiCl4 pre valve closed
11/23/2011	6:03:32 PM	SiCl4 post valve closed
11/23/2011	6:03:32 PM	Bypass valve closed
11/23/2011	6:03:32 PM	Bubbler valve closed
11/23/2011	6:03:32 PM	Main Vac valve opened
11/23/2011	6:03:32 PM	Helium MFC set to  0.000000
11/23/2011	6:03:32 PM	H2 MFC set to  0.000000
11/23/2011	6:03:32 PM	BCl3 MFC set to  0.000000
11/23/2011	6:03:32 PM	PHl3 MFC set to  0.000000
11/23/2011	6:03:32 PM	SiCl4 MFC set to  0.000000
11/23/2011	6:03:32 PM	Bypass solenoid MFC set to  0.000000
11/23/2011	6:03:32 PM	Tube furnace set to 0
11/23/2011	6:03:33 PM	Run finished at 6:03 PM
11/23/2011	6:03:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
